{"_buckets": {"deposit": "c28895b0-0e77-430d-8cf8-c36838513e53"}, "_deposit": {"id": "31060", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "31060"}, "status": "published"}, "_oai": {"id": "oai:niigata-u.repo.nii.ac.jp:00031060"}, "item_8_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2001-06", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "49", "bibliographicPageStart": "46", "bibliographicVolumeNumber": "4416", "bibliographic_titles": [{"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering"}, {"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering", "bibliographic_titleLang": "en"}]}]}, "item_8_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "The system we propose uses two separate wavelengths to measure step height. Two laser diodes alternately modulated with a sinusoidal signal separate a like number of overlapping interference images detected by CCD camera, the phase map being obtained by a modulated LD. In this instance, the 1 micrometers step height was accurately detected.", "subitem_description_type": "Abstract"}]}, "item_8_description_5": {"attribute_name": "\u5185\u5bb9\u8a18\u8ff0", "attribute_value_mlt": [{"subitem_description": "Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001 : Yokohama, Japan. : Jun 2001, Yokohama, Japan", "subitem_description_type": "Other"}]}, "item_8_publisher_7": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "International Society for Optical Engineering, SPIE"}]}, "item_8_relation_14": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "info:doi/10.1117/12.427082", "subitem_relation_type_select": "DOI"}}]}, "item_8_rights_15": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright 2001 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited."}]}, "item_8_select_19": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_8_source_id_11": {"attribute_name": "\u66f8\u8a8c\u30ec\u30b3\u30fc\u30c9ID", "attribute_value_mlt": [{"subitem_source_identifier": "AA10619755", "subitem_source_identifier_type": "NCID"}]}, "item_8_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0277786X", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Suzuki, Takamasa"}], "nameIdentifiers": [{"nameIdentifier": "39", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Yazawa, Takayuki"}], "nameIdentifiers": [{"nameIdentifier": "169495", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sasaki, Osami"}], "nameIdentifiers": [{"nameIdentifier": "169496", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-08-26"}], "displaytype": "detail", "download_preview_message": "", "filename": "4416_46-49.pdf", "filesize": [{"value": "403.6 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 4036000, "url": {"label": "4416_46-49.pdf", "url": "https://niigata-u.repo.nii.ac.jp/record/31060/files/4416_46-49.pdf"}, "version_id": "c4aa501e-49e7-4800-b30e-6e55ad4df047"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "interferometer", "subitem_subject_scheme": "Other"}, {"subitem_subject": "two-wavelength method", "subitem_subject_scheme": "Other"}, {"subitem_subject": "step-height measurement", "subitem_subject_scheme": "Other"}, {"subitem_subject": "laser diode", "subitem_subject_scheme": "Other"}, {"subitem_subject": "sinusoidal modulation", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation"}, {"subitem_title": "Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation", "subitem_title_language": "en"}]}, "item_type_id": "8", "owner": "1", "path": ["453/457", "423/435/1827"], "permalink_uri": "http://hdl.handle.net/10191/27490", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_name_i18n": "\u516c\u958b\u65e5", "attribute_value": "2014-06-20"}, "publish_date": "2014-06-20", "publish_status": "0", "recid": "31060", "relation": {}, "relation_version_is_last": true, "title": ["Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation"], "weko_shared_id": null}