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Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation
http://hdl.handle.net/10191/27490
http://hdl.handle.net/10191/274907e6dfd81-0d86-4a28-a929-57821a933cb5
名前 / ファイル | ライセンス | アクション |
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4416_46-49.pdf (403.6 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation | |||||
タイトル | ||||||
タイトル | Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation | |||||
言語 | en | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometer | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | two-wavelength method | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | step-height measurement | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | laser diode | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | sinusoidal modulation | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Yazawa, Takayuki× Sasaki, Osami |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The system we propose uses two separate wavelengths to measure step height. Two laser diodes alternately modulated with a sinusoidal signal separate a like number of overlapping interference images detected by CCD camera, the phase map being obtained by a modulated LD. In this instance, the 1 micrometers step height was accurately detected. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001 : Yokohama, Japan. : Jun 2001, Yokohama, Japan | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 4416, p. 46-49, 発行日 2001-06 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
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収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.427082 | |||||
権利 | ||||||
権利情報 | Copyright 2001 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
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値 | publisher |