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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation

http://hdl.handle.net/10191/27490
http://hdl.handle.net/10191/27490
7e6dfd81-0d86-4a28-a929-57821a933cb5
名前 / ファイル ライセンス アクション
4416_46-49.pdf 4416_46-49.pdf (403.6 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation
タイトル
言語 en
タイトル Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation
言語
言語 eng
キーワード
主題Scheme Other
主題 interferometer
キーワード
主題Scheme Other
主題 two-wavelength method
キーワード
主題Scheme Other
主題 step-height measurement
キーワード
主題Scheme Other
主題 laser diode
キーワード
主題Scheme Other
主題 sinusoidal modulation
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
Yazawa, Takayuki

× Yazawa, Takayuki

WEKO 169495

Yazawa, Takayuki

Search repository
Sasaki, Osami

× Sasaki, Osami

WEKO 169496

Sasaki, Osami

Search repository
抄録
内容記述タイプ Abstract
内容記述 The system we propose uses two separate wavelengths to measure step height. Two laser diodes alternately modulated with a sinusoidal signal separate a like number of overlapping interference images detected by CCD camera, the phase map being obtained by a modulated LD. In this instance, the 1 micrometers step height was accurately detected.
内容記述
内容記述タイプ Other
内容記述 Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001 : Yokohama, Japan. : Jun 2001, Yokohama, Japan
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 4416, p. 46-49, 発行日 2001-06
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.427082
権利
権利情報 Copyright 2001 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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