{"created":"2021-03-01T06:37:11.596966+00:00","id":31060,"links":{},"metadata":{"_buckets":{"deposit":"c28895b0-0e77-430d-8cf8-c36838513e53"},"_deposit":{"id":"31060","owners":[],"pid":{"revision_id":0,"type":"depid","value":"31060"},"status":"published"},"_oai":{"id":"oai:niigata-u.repo.nii.ac.jp:00031060","sets":["423:435:1827","453:457"]},"item_8_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2001-06","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"49","bibliographicPageStart":"46","bibliographicVolumeNumber":"4416","bibliographic_titles":[{"bibliographic_title":"Proceedings of SPIE - the International Society for Optical Engineering"},{"bibliographic_title":"Proceedings of SPIE - the International Society for Optical Engineering","bibliographic_titleLang":"en"}]}]},"item_8_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The system we propose uses two separate wavelengths to measure step height. Two laser diodes alternately modulated with a sinusoidal signal separate a like number of overlapping interference images detected by CCD camera, the phase map being obtained by a modulated LD. In this instance, the 1 micrometers step height was accurately detected.","subitem_description_type":"Abstract"}]},"item_8_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001 : Yokohama, Japan. : Jun 2001, Yokohama, Japan","subitem_description_type":"Other"}]},"item_8_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"International Society for Optical Engineering, SPIE"}]},"item_8_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"info:doi/10.1117/12.427082","subitem_relation_type_select":"DOI"}}]},"item_8_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright 2001 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited."}]},"item_8_select_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_8_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA10619755","subitem_source_identifier_type":"NCID"}]},"item_8_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0277786X","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Suzuki, Takamasa"}],"nameIdentifiers":[{"nameIdentifier":"39","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yazawa, Takayuki"}],"nameIdentifiers":[{"nameIdentifier":"169495","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Sasaki, Osami"}],"nameIdentifiers":[{"nameIdentifier":"169496","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-08-26"}],"displaytype":"detail","filename":"4416_46-49.pdf","filesize":[{"value":"403.6 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"4416_46-49.pdf","url":"https://niigata-u.repo.nii.ac.jp/record/31060/files/4416_46-49.pdf"},"version_id":"c4aa501e-49e7-4800-b30e-6e55ad4df047"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"interferometer","subitem_subject_scheme":"Other"},{"subitem_subject":"two-wavelength method","subitem_subject_scheme":"Other"},{"subitem_subject":"step-height measurement","subitem_subject_scheme":"Other"},{"subitem_subject":"laser diode","subitem_subject_scheme":"Other"},{"subitem_subject":"sinusoidal modulation","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation"},{"subitem_title":"Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation","subitem_title_language":"en"}]},"item_type_id":"8","owner":"1","path":["457","1827"],"pubdate":{"attribute_name":"公開日","attribute_value":"2014-06-20"},"publish_date":"2014-06-20","publish_status":"0","recid":"31060","relation_version_is_last":true,"title":["Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-15T04:01:37.105494+00:00"}