@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031060,
 author = {Suzuki, Takamasa and Yazawa, Takayuki and Sasaki, Osami},
 book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering},
 month = {Jun},
 note = {The system we propose uses two separate wavelengths to measure step height. Two laser diodes alternately modulated with a sinusoidal signal separate a like number of overlapping interference images detected by CCD camera, the phase map being obtained by a modulated LD. In this instance, the 1 micrometers step height was accurately detected., Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001 : Yokohama, Japan. : Jun 2001, Yokohama, Japan},
 pages = {46--49},
 publisher = {International Society for Optical Engineering, SPIE},
 title = {Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation},
 volume = {4416},
 year = {2001}
}