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Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer
http://hdl.handle.net/10191/27603
http://hdl.handle.net/10191/27603d7725d90-572a-4807-a285-46e4f4f83967
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
33_8_2754-2759.pdf (684.4 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer | |||||
| タイトル | ||||||
| タイトル | Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | interferometer | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | laser diode | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | sinusoidal phase modulation | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | image sensor | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Sasaki, Osami× Kaneda, Jinsaku× Maruyama, Takeo |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A real-time 2D surface profile measurement system is described. In this system, a laser diode and a 2D charge-coupled device image sensor are used as a light source and a photodetector, respectively. The phase is detected from the sinusoidal phase-modulating interference signal using the high-speed electrical circuit. The time required for phase detection is 20 ms for 50 X 40 measuring points. Because the phases can be obtained for even and odd fields of the image sensor, the original spatial resolution of the image sensor is not reduced in this system. Repeatability of the measurements is approximately 14 nm, rms. | |||||
| 書誌情報 |
Optical Engineering en : Optical Engineering 巻 33, 号 8, p. 2754-2759, 発行日 1994-08 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00913286 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00333891 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.173561 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 1994 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
