@article{oai:niigata-u.repo.nii.ac.jp:00002222,
 author = {Suzuki, Takamasa and Sasaki, Osami and Kaneda, Jinsaku and Maruyama, Takeo},
 issue = {8},
 journal = {Optical Engineering, Optical Engineering},
 month = {Aug},
 note = {A real-time 2D surface profile measurement system is described. In this system, a laser diode and a 2D charge-coupled device image sensor are used as a light source and a photodetector, respectively. The phase is detected from the sinusoidal phase-modulating interference signal using the high-speed electrical circuit. The time required for phase detection is 20 ms for 50 X 40 measuring points. Because the phases can be obtained for even and odd fields of the image sensor, the original spatial resolution of the image sensor is not reduced in this system. Repeatability of the measurements is approximately 14 nm, rms.},
 pages = {2754--2759},
 title = {Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer},
 volume = {33},
 year = {1994}
}