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Exact measurement of flat surface profiles by object shifts in a phase-conjugate Fizeau interferometer
http://hdl.handle.net/10191/27596
http://hdl.handle.net/10191/27596b46a5396-a738-4483-bac0-ccdc2436eb41
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Exact measurement of flat surface profiles by object shifts in a phase-conjugate Fizeau interferometer | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Exact measurement of flat surface profiles by object shifts in a phase-conjugate Fizeau interferometer | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | flatness testing | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometers | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | phase conjugation | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Takebayashi, Yuuichi× Wang, Xiangzhao× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We propose a method of exact measurement of flat surface profiles in a phase-conjugate Fizeau interferometer. Aberration of lenses causes an undesirable phase distribution in the interference signal of the phase-conjugate Fizeau interferometer. To eliminate this phase distribution, we shift the object in two directions orthogonal to each other and displacements of the object surface involved in the shifts lead to some small errors in the difference values. We estimate an exact surface profile by solving the difference equations. Characteristics of the method are made clear through computer simulations and measurments of a 40-mm-diameter flat mirror. | |||||
書誌情報 |
Optical Engineering en : Optical Engineering 巻 34, 号 10, p. 2957-2963, 発行日 1995-10 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00913286 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00333891 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.210750 | |||||
権利 | ||||||
権利情報 | Copyright 1995 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
著者版フラグ | ||||||
値 | publisher |