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Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer
http://hdl.handle.net/10191/27592
http://hdl.handle.net/10191/2759204fc70a7-7b05-4e47-b2fe-22d570de5673
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
38_10_1679-1682.pdf (425.9 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer | |||||
| タイトル | ||||||
| タイトル | Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | low coherence interferometry | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | superluminescent diode | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | surface profiles | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | glass plate | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Sasaki, Osami
× Sasaki, Osami× Nakada, Takayuki× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A superluminescent diode interferometer that uses sinusoidal phase-modulating interferometry and the shifting method is applied to measure the front and rear surface profiles of a glass plate with an accuracy of a few nanometers. Since the roughness of the reference surface is large, a glass plate is put behind the object as another reference surface, which is estimated by the shifting method with an accuracy of a few nanometers. | |||||
| 書誌情報 |
Optical Engineering en : Optical Engineering 巻 38, 号 10, p. 1679-1682, 発行日 1999-10 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00913286 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00333891 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/1.602038 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 1999 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Sasaki, Osami, Nakada, Takayuki, Suzuki, Takamasa, 1999, Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer: International Society for Optical Engineering, SPIE, 1679–1682 p.
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