@article{oai:niigata-u.repo.nii.ac.jp:00002214, author = {Sasaki, Osami and Nakada, Takayuki and Suzuki, Takamasa}, issue = {10}, journal = {Optical Engineering, Optical Engineering}, month = {Oct}, note = {A superluminescent diode interferometer that uses sinusoidal phase-modulating interferometry and the shifting method is applied to measure the front and rear surface profiles of a glass plate with an accuracy of a few nanometers. Since the roughness of the reference surface is large, a glass plate is put behind the object as another reference surface, which is estimated by the shifting method with an accuracy of a few nanometers.}, pages = {1679--1682}, title = {Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer}, volume = {38}, year = {1999} }