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Two-grating interferometer with sinusoidal phase modulation for surface profile measurement
http://hdl.handle.net/10191/27620
http://hdl.handle.net/10191/276204e54a5ca-45a3-42e5-8ba2-6f4b6828658d
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
44_4_043601.pdf (575.5 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Two-grating interferometer with sinusoidal phase modulation for surface profile measurement | |||||
| タイトル | ||||||
| タイトル | Two-grating interferometer with sinusoidal phase modulation for surface profile measurement | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | surface profile measurement | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | grating interferometer | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | fringe projection | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | sinusoidal phase modulation | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Xu, Yande
× Xu, Yande× Sasaki, Osami× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A two-grating interferometer for measurement of profiles of polished surfaces is proposed. The +/-first-order beams diffracted by the first grating produce parallel fringes of about 50-µm spacing on an object surface. By using the second grating, we eliminate the parallel fringes and extract a phase distribution produced by the surface profile of the object. Moreover, the vibration of the second grating of a small size enables us to use the sinusoidal phase-modulating interferometry. Measurement resolution is higher than 0.3 µm at the equivalent wavelength of 35 µm. | |||||
| 書誌情報 |
Optical Engineering en : Optical Engineering 巻 44, 号 4, p. 043601-1-043601-6, 発行日 2005-04 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00913286 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00333891 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/1.1883083 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 2005 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Xu, Yande, Sasaki, Osami, Suzuki, Takamasa, 2005, Two-grating interferometer with sinusoidal phase modulation for surface profile measurement: International Society for Optical Engineering, SPIE, 043601-1-043601-6 p.
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