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  1. 060 工学部
  2. 10 学術雑誌論文
  3. 10 査読済論文
  1. 0 資料タイプ別
  2. 01 学術雑誌論文

Two-grating interferometer with sinusoidal phase modulation for surface profile measurement

http://hdl.handle.net/10191/27620
http://hdl.handle.net/10191/27620
4e54a5ca-45a3-42e5-8ba2-6f4b6828658d
名前 / ファイル ライセンス アクション
44_4_043601.pdf 44_4_043601.pdf (575.5 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2014-06-20
タイトル
タイトル Two-grating interferometer with sinusoidal phase modulation for surface profile measurement
タイトル
言語 en
タイトル Two-grating interferometer with sinusoidal phase modulation for surface profile measurement
言語
言語 eng
キーワード
主題Scheme Other
主題 surface profile measurement
キーワード
主題Scheme Other
主題 grating interferometer
キーワード
主題Scheme Other
主題 fringe projection
キーワード
主題Scheme Other
主題 sinusoidal phase modulation
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Xu, Yande

× Xu, Yande

WEKO 7453

Xu, Yande

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Sasaki, Osami

× Sasaki, Osami

WEKO 7454

Sasaki, Osami

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 A two-grating interferometer for measurement of profiles of polished surfaces is proposed. The +/-first-order beams diffracted by the first grating produce parallel fringes of about 50-µm spacing on an object surface. By using the second grating, we eliminate the parallel fringes and extract a phase distribution produced by the surface profile of the object. Moreover, the vibration of the second grating of a small size enables us to use the sinusoidal phase-modulating interferometry. Measurement resolution is higher than 0.3 µm at the equivalent wavelength of 35 µm.
書誌情報 Optical Engineering
en : Optical Engineering

巻 44, 号 4, p. 043601-1-043601-6, 発行日 2005-04
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 00913286
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00333891
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/1.1883083
権利
権利情報 Copyright 2005 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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