@article{oai:niigata-u.repo.nii.ac.jp:00002203,
 author = {Xu, Yande and Sasaki, Osami and Suzuki, Takamasa},
 issue = {4},
 journal = {Optical Engineering, Optical Engineering},
 month = {Apr},
 note = {A two-grating interferometer for measurement of profiles of polished surfaces is proposed. The +/-first-order beams diffracted by the first grating produce parallel fringes of about 50-µm spacing on an object surface. By using the second grating, we eliminate the parallel fringes and extract a phase distribution produced by the surface profile of the object. Moreover, the vibration of the second grating of a small size enables us to use the sinusoidal phase-modulating interferometry. Measurement resolution is higher than 0.3 µm at the equivalent wavelength of 35 µm.},
 pages = {043601-1--043601-6},
 title = {Two-grating interferometer with sinusoidal phase modulation for surface profile measurement},
 volume = {44},
 year = {2005}
}