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Small rotation angle measurement using an imaging method
http://hdl.handle.net/10191/27496
http://hdl.handle.net/10191/27496b0bee3ef-5cb8-48de-9334-7c7228395f66
| 名前 / ファイル | ライセンス | アクション |
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| Item type | 会議発表論文 / Conference Paper(1) | |||||
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| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Small rotation angle measurement using an imaging method | |||||
| タイトル | ||||||
| タイトル | Small rotation angle measurement using an imaging method | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | rotation angle measurement | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | image processing | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | fringe projection | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | n-line measurement | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_5794 | |||||
| タイプ | conference paper | |||||
| 著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Nakamura, Hideki× Greivenkamp, John E.× Sasaki, Osami |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A system of small rotation angle measurement based on the fringe projection is proposed and demonstrated. This system has potential for a broad range of uses and a robustness for the external disturbances, because it requires no coherent light. The setup is very simple and applicable to the automatic on-line measurement. Several measurements indicate a sensitivity of 3 arcsec. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | Three-dimensional imaging, optical metrology, and inspection 5 : Conference : Sep 1999, Boston, MA | |||||
| 書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 3835, p. 14-21, 発行日 1999-09 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0277786X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10619755 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.370258 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 1999 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
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| 値 | publisher | |||||