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Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source
http://hdl.handle.net/10191/27472
http://hdl.handle.net/10191/27472ec2f93c9-6f78-42ca-9157-4617217dfbb4
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
7511_75110B.pdf (2.8 MB)
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| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source | |||||
| タイトル | ||||||
| タイトル | Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | interferometer | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | wavelength scanning | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | shape measurement | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | thin film | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_5794 | |||||
| タイプ | conference paper | |||||
| 著者 |
Sasaki, Osami
× Sasaki, Osami× Ueno, Hiroshi× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A halogen lamp and an acousto-optic tunable filter are used to construct a sinusoidal wavelength-scanning interferometer with the scanning width of 210 nm. A linear wavelength-scanning with the scanning width of 220 nm is utilized to determine amplitudes of three different interference signals produced from multiple-reflection lights by front and rear surfaces of a thin film. Amplitudes of time-varying phases produced by a sinusoidal wavelength-scanning and constant phases in the interference signals are estimated by minimizing a difference between detected signals and theoretical ones. From the estimated values, the positions of the front and rear surface of the thin film with a thickness of about 460 nm are measured with an error less than 4 nm. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 2009 international conference on optical instruments and technology : optoelectronic measurement technology and systems : 19-22 October 2009 : Shanghai, China. : 2009 international conference on optical instrument and technology : OIT’09 : Oct 2009, Shanghai, China | |||||
| 書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 7511, p. 75110B-1-75110B-7, 発行日 2009-11 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0277786X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10619755 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.840190 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 2009 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Sasaki, Osami, Ueno, Hiroshi, Suzuki, Takamasa, 2009, Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source: International Society for Optical Engineering, SPIE, 75110B-1-75110B-7 p.
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