@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031032,
 author = {Sasaki, Osami and Ueno, Hiroshi and Suzuki, Takamasa},
 book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering},
 month = {Nov},
 note = {A halogen lamp and an acousto-optic tunable filter are used to construct a sinusoidal wavelength-scanning interferometer with the scanning width of 210 nm. A linear wavelength-scanning with the scanning width of 220 nm is utilized to determine amplitudes of three different interference signals produced from multiple-reflection lights by front and rear surfaces of a thin film. Amplitudes of time-varying phases produced by a sinusoidal wavelength-scanning and constant phases in the interference signals are estimated by minimizing a difference between detected signals and theoretical ones. From the estimated values, the positions of the front and rear surface of the thin film with a thickness of about 460 nm are measured with an error less than 4 nm., 2009 international conference on optical instruments and technology : optoelectronic measurement technology and systems : 19-22 October 2009 : Shanghai, China. : 2009 international conference on optical instrument and technology : OIT’09 : Oct 2009, Shanghai, China},
 pages = {75110B-1--75110B-7},
 publisher = {International Society for Optical Engineering, SPIE},
 title = {Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source},
 volume = {7511},
 year = {2009}
}