{"created":"2021-03-01T06:37:09.728173+00:00","id":31032,"links":{},"metadata":{"_buckets":{"deposit":"f7377008-910d-4600-ae0f-034425766bb7"},"_deposit":{"id":"31032","owners":[],"pid":{"revision_id":0,"type":"depid","value":"31032"},"status":"published"},"_oai":{"id":"oai:niigata-u.repo.nii.ac.jp:00031032","sets":["423:435:1827","453:457"]},"item_8_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009-11","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"75110B-7","bibliographicPageStart":"75110B-1","bibliographicVolumeNumber":"7511","bibliographic_titles":[{"bibliographic_title":"Proceedings of SPIE - the International Society for Optical Engineering"},{"bibliographic_title":"Proceedings of SPIE - the International Society for Optical Engineering","bibliographic_titleLang":"en"}]}]},"item_8_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"A halogen lamp and an acousto-optic tunable filter are used to construct a sinusoidal wavelength-scanning interferometer with the scanning width of 210 nm. A linear wavelength-scanning with the scanning width of 220 nm is utilized to determine amplitudes of three different interference signals produced from multiple-reflection lights by front and rear surfaces of a thin film. Amplitudes of time-varying phases produced by a sinusoidal wavelength-scanning and constant phases in the interference signals are estimated by minimizing a difference between detected signals and theoretical ones. From the estimated values, the positions of the front and rear surface of the thin film with a thickness of about 460 nm are measured with an error less than 4 nm.","subitem_description_type":"Abstract"}]},"item_8_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"2009 international conference on optical instruments and technology : optoelectronic measurement technology and systems : 19-22 October 2009 : Shanghai, China. : 2009 international conference on optical instrument and technology : OIT’09 : Oct 2009, Shanghai, China","subitem_description_type":"Other"}]},"item_8_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"International Society for Optical Engineering, SPIE"}]},"item_8_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"info:doi/10.1117/12.840190","subitem_relation_type_select":"DOI"}}]},"item_8_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright 2009 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited."}]},"item_8_select_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_8_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA10619755","subitem_source_identifier_type":"NCID"}]},"item_8_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0277786X","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Sasaki, Osami"}],"nameIdentifiers":[{"nameIdentifier":"169394","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Ueno, Hiroshi"}],"nameIdentifiers":[{"nameIdentifier":"169395","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Suzuki, Takamasa"}],"nameIdentifiers":[{"nameIdentifier":"39","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-08-26"}],"displaytype":"detail","filename":"7511_75110B.pdf","filesize":[{"value":"2.8 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"7511_75110B.pdf","url":"https://niigata-u.repo.nii.ac.jp/record/31032/files/7511_75110B.pdf"},"version_id":"e696ac5c-6048-46e4-b78c-35336447506b"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"interferometer","subitem_subject_scheme":"Other"},{"subitem_subject":"wavelength scanning","subitem_subject_scheme":"Other"},{"subitem_subject":"shape measurement","subitem_subject_scheme":"Other"},{"subitem_subject":"thin film","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source"},{"subitem_title":"Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source","subitem_title_language":"en"}]},"item_type_id":"8","owner":"1","path":["457","1827"],"pubdate":{"attribute_name":"公開日","attribute_value":"2014-06-20"},"publish_date":"2014-06-20","publish_status":"0","recid":"31032","relation_version_is_last":true,"title":["Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-15T04:01:33.867838+00:00"}