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Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations
http://hdl.handle.net/10191/31153
http://hdl.handle.net/10191/31153c9152b71-8f2d-4eda-8438-dd4c3ab5a08a
名前 / ファイル | ライセンス | アクション |
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-12-18 | |||||
タイトル | ||||||
タイトル | Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometer | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | wavelength scanning | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | sinusoidal phase modulation | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | thickness measurement | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | thin film | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_5794 | |||||
タイプ | conference paper | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Morimatsu, Takafumi× Choi, Samuel× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Two light beams reflected from a front and rear surfaces of a glass film of 20 micron thickness interfere with each other in a common path interferometer. Sinusoidal wavelength-scanning light with the scanning amplitude of 5 nm and frequency of 15 KHz is used to generate a sinusoidal phase-modulated interference signal with the modulation amplitude of 2.6 rad. The phase of the interference signal provides the thickness variation of the film, whose measurement accuracy is a few nanometers. Moreover, in order to achieve a high spatial resolution and a wide measurement region a focused beam is scanned on the surface of the film with a rotating mirror. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Optical metrology and inspection for industrial applications : 18-20 October 2010 : Beijing, China. | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 7855, p. 78550S-1-78550S-6, 発行日 2010-11 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.871030 | |||||
権利 | ||||||
権利情報 | Copyright(C)2010 Society of Photo-Optical Instrumentation Engineers | |||||
著者版フラグ | ||||||
値 | publisher |