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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations

http://hdl.handle.net/10191/31153
c9152b71-8f2d-4eda-8438-dd4c3ab5a08a
プレビュー
名前 / ファイル ライセンス Actions
7855_78550S.pdf 7855_78550S.pdf (1.6 MB)
item type 会議発表論文 / Conference Paper(1)
公開日 2014-12-18
タイトル
タイトル Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations
タイトル
言語 en
タイトル Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations
言語
言語 eng
キーワード
主題Scheme Other
主題 interferometer
キーワード
主題Scheme Other
主題 wavelength scanning
キーワード
主題Scheme Other
主題 sinusoidal phase modulation
キーワード
主題Scheme Other
主題 thickness measurement
キーワード
主題Scheme Other
主題 thin film
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 169387

Sasaki, Osami

Search repository
Morimatsu, Takafumi

× Morimatsu, Takafumi

WEKO 169388

Morimatsu, Takafumi

Search repository
Choi, Samuel

× Choi, Samuel

WEKO 169389

Choi, Samuel

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 Two light beams reflected from a front and rear surfaces of a glass film of 20 micron thickness interfere with each other in a common path interferometer. Sinusoidal wavelength-scanning light with the scanning amplitude of 5 nm and frequency of 15 KHz is used to generate a sinusoidal phase-modulated interference signal with the modulation amplitude of 2.6 rad. The phase of the interference signal provides the thickness variation of the film, whose measurement accuracy is a few nanometers. Moreover, in order to achieve a high spatial resolution and a wide measurement region a focused beam is scanned on the surface of the film with a rotating mirror.
内容記述
内容記述タイプ Other
内容記述 Optical metrology and inspection for industrial applications : 18-20 October 2010 : Beijing, China.
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 7855, p. 78550S-1-78550S-6, 発行日 2010-11
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
関連識別子
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.871030
権利
権利情報 Copyright(C)2010 Society of Photo-Optical Instrumentation Engineers
著者版フラグ
値 publisher
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