{"_buckets": {"deposit": "fb2963dc-41dd-4869-8066-b4caaee36423"}, "_deposit": {"id": "31030", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "31030"}, "status": "published"}, "_oai": {"id": "oai:niigata-u.repo.nii.ac.jp:00031030"}, "item_8_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2010-11", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "78550S-6", "bibliographicPageStart": "78550S-1", "bibliographicVolumeNumber": "7855", "bibliographic_titles": [{"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering"}, {"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering", "bibliographic_titleLang": "en"}]}]}, "item_8_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "Two light beams reflected from a front and rear surfaces of a glass film of 20 micron thickness interfere with each other in a common path interferometer. Sinusoidal wavelength-scanning light with the scanning amplitude of 5 nm and frequency of 15 KHz is used to generate a sinusoidal phase-modulated interference signal with the modulation amplitude of 2.6 rad. The phase of the interference signal provides the thickness variation of the film, whose measurement accuracy is a few nanometers. Moreover, in order to achieve a high spatial resolution and a wide measurement region a focused beam is scanned on the surface of the film with a rotating mirror.", "subitem_description_type": "Abstract"}]}, "item_8_description_5": {"attribute_name": "\u5185\u5bb9\u8a18\u8ff0", "attribute_value_mlt": [{"subitem_description": "Optical metrology and inspection for industrial applications : 18-20 October 2010 : Beijing, China.", "subitem_description_type": "Other"}]}, "item_8_publisher_7": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "International Society for Optical Engineering, SPIE"}]}, "item_8_relation_14": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "info:doi/10.1117/12.871030", "subitem_relation_type_select": "DOI"}}]}, "item_8_rights_15": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright(C)2010 Society of Photo-Optical Instrumentation Engineers"}]}, "item_8_select_19": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_8_source_id_11": {"attribute_name": "\u66f8\u8a8c\u30ec\u30b3\u30fc\u30c9ID", "attribute_value_mlt": [{"subitem_source_identifier": "AA10619755", "subitem_source_identifier_type": "NCID"}]}, "item_8_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0277786X", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Sasaki, Osami"}], "nameIdentifiers": [{"nameIdentifier": "169387", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Morimatsu, Takafumi"}], "nameIdentifiers": [{"nameIdentifier": "169388", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Choi, Samuel"}], "nameIdentifiers": [{"nameIdentifier": "169389", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Suzuki, Takamasa"}], "nameIdentifiers": [{"nameIdentifier": "39", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-08-26"}], "displaytype": "detail", "download_preview_message": "", "filename": "7855_78550S.pdf", "filesize": [{"value": "1.6 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 16000000, "url": {"label": "7855_78550S.pdf", "url": "https://niigata-u.repo.nii.ac.jp/record/31030/files/7855_78550S.pdf"}, "version_id": "c345ef7c-d67a-47cc-b0e5-b998cdf99f0f"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "interferometer", "subitem_subject_scheme": "Other"}, {"subitem_subject": "wavelength scanning", "subitem_subject_scheme": "Other"}, {"subitem_subject": "sinusoidal phase modulation", "subitem_subject_scheme": "Other"}, {"subitem_subject": "thickness measurement", "subitem_subject_scheme": "Other"}, {"subitem_subject": "thin film", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations"}, {"subitem_title": "Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations", "subitem_title_language": "en"}]}, "item_type_id": "8", "owner": "1", "path": ["453/457", "423/435/1827"], "permalink_uri": "http://hdl.handle.net/10191/31153", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_name_i18n": "\u516c\u958b\u65e5", "attribute_value": "2014-12-18"}, "publish_date": "2014-12-18", "publish_status": "0", "recid": "31030", "relation": {}, "relation_version_is_last": true, "title": ["Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations"], "weko_shared_id": null}