@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031030,
 author = {Sasaki, Osami and Morimatsu, Takafumi and Choi, Samuel and Suzuki, Takamasa},
 book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering},
 month = {Nov},
 note = {Two light beams reflected from a front and rear surfaces of a glass film of 20 micron thickness interfere with each other in a common path interferometer. Sinusoidal wavelength-scanning light with the scanning amplitude of 5 nm and frequency of 15 KHz is used to generate a sinusoidal phase-modulated interference signal with the modulation amplitude of 2.6 rad. The phase of the interference signal provides the thickness variation of the film, whose measurement accuracy is a few nanometers. Moreover, in order to achieve a high spatial resolution and a wide measurement region a focused beam is scanned on the surface of the film with a rotating mirror., Optical metrology and inspection for industrial applications : 18-20 October 2010 : Beijing, China.},
 pages = {78550S-1--78550S-6},
 publisher = {International Society for Optical Engineering, SPIE},
 title = {Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations},
 volume = {7855},
 year = {2010}
}