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  1. 060 工学部
  2. 10 学術雑誌論文
  3. 10 査読済論文
  1. 0 資料タイプ別
  2. 01 学術雑誌論文

Step-profile measurement by backpropagation of multiple-wavelength optical fields

http://hdl.handle.net/10191/27503
http://hdl.handle.net/10191/27503
7294850e-2de5-4851-afe7-565a863a6304
名前 / ファイル ライセンス アクション
32_18_2683-2685.pdf 32_18_2683-2685.pdf (340.8 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2014-06-20
タイトル
タイトル Step-profile measurement by backpropagation of multiple-wavelength optical fields
タイトル
言語 en
タイトル Step-profile measurement by backpropagation of multiple-wavelength optical fields
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 7546

Sasaki, Osami

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Tai, Hisashi

× Tai, Hisashi

WEKO 7547

Tai, Hisashi

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Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

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抄録
内容記述タイプ Abstract
内容記述 Multiple-wavelength optical fields on a detecting plane of an interferometer are generated from the interference signals detected for an object surface. The generated optical fields are backpropagated along the optical axis. An optical field along the optical axis is reconstructed by summing the backpropagated fields over the multiple wavelengths. The intensity and phase distributions of the reconstructed optical field provide the position of the object surface with an accuracy of a few nanometers.
書誌情報 Optics Letters
en : Optics Letters

巻 32, 号 18, p. 2683-2685, 発行日 2007-10
出版者
出版者 Optical Society of America
ISSN
収録物識別子タイプ ISSN
収録物識別子 01469592
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00764838
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1364/OL.32.002683
権利
権利情報 © 2007 Optical Society of America
権利
権利情報 This paper was published in Optics Letters and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OL.32.002683. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
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