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Sinusoidal phase-modulating Fizeau interferometer using a self-pumped phase conjugator for surface profile measurements
http://hdl.handle.net/10191/27611
http://hdl.handle.net/10191/276115a10c747-3325-44f7-af73-89b2f3311ba9
名前 / ファイル | ライセンス | アクション |
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33_8_2670-2674.pdf (586.6 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Sinusoidal phase-modulating Fizeau interferometer using a self-pumped phase conjugator for surface profile measurements | |||||
タイトル | ||||||
タイトル | Sinusoidal phase-modulating Fizeau interferometer using a self-pumped phase conjugator for surface profile measurements | |||||
言語 | en | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | surface profile measurement | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometerry | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | phase conjugation | |||||
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資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Wang, Xiangzhao
× Wang, Xiangzhao× Sasaki, Osami× Takebayashi, Yuuichi× Suzuki, Takamasa× Maruyama, Takeo |
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内容記述タイプ | Abstract | |||||
内容記述 | A sinusoidal phase-modulating Fizeau interferometer using a BaTiO3 self-pumped phase conjugator is constructed to measure surface profiles of objects with a high accuracy. An object field is formed on a surface of a glass plate where the object wave interferes with its phase conjugate wave. Because the size of the glass plate can be much smaller than that of the object, the sinusoidal phase modulation by vibrating the glass plate is easy and accurate for measurements of the surface profiles of large-diameter objects. The interferometer is self- referencing and free of the phase fluctuations of the object wave caused by spatially uniform movements of objects. The usefulness of the interferometer is made clear through the surface profile measurements of a diamond-turned aluminum disk and mirror. | |||||
書誌情報 |
Optical Engineering en : Optical Engineering 巻 33, 号 8, p. 2670-2674, 発行日 1994-08 |
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出版者 | International Society for Optical Engineering, SPIE | |||||
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収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00913286 | |||||
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収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00333891 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.173590 | |||||
権利 | ||||||
権利情報 | Copyright 1994 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
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値 | publisher |