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Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control
http://hdl.handle.net/10191/27597
http://hdl.handle.net/10191/2759729f89ccf-7432-4dc3-b0ca-1a58b516fbdd
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
43_6_1329-1333.pdf (555.2 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control | |||||
| タイトル | ||||||
| タイトル | Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | step-profile measurement | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | interferometer | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | wavelength scanning | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | phase lock | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Sasaki, Osami
× Sasaki, Osami× Honma, Kunihiro× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A linear CCD image sensor is used to electrically scan a measuring point and measure 1-D step-profiles in real time with a sinusoidal wavelength-scanning (SWS) interferometer using double feedback control. In this interferometer, the optical path difference (OPD) and the amplitude of the SWS are controlled so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. Two different step profiles with step heights of 1 and 20 μm, respectively, are measured with a measurement error of less than 8 nm. Measuring time for one measuring point is 0.04 s. | |||||
| 書誌情報 |
Optical Engineering en : Optical Engineering 巻 43, 号 6, p. 1329-1333, 発行日 2004-06 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00913286 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00333891 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/1.1737375 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 2004 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Sasaki, Osami, Honma, Kunihiro, Suzuki, Takamasa, 2004, Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control: International Society for Optical Engineering, SPIE, 1329–1333 p.
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