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Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control
http://hdl.handle.net/10191/27597
http://hdl.handle.net/10191/2759729f89ccf-7432-4dc3-b0ca-1a58b516fbdd
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | step-profile measurement | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometer | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | wavelength scanning | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | phase lock | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Honma, Kunihiro× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A linear CCD image sensor is used to electrically scan a measuring point and measure 1-D step-profiles in real time with a sinusoidal wavelength-scanning (SWS) interferometer using double feedback control. In this interferometer, the optical path difference (OPD) and the amplitude of the SWS are controlled so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. Two different step profiles with step heights of 1 and 20 μm, respectively, are measured with a measurement error of less than 8 nm. Measuring time for one measuring point is 0.04 s. | |||||
書誌情報 |
Optical Engineering en : Optical Engineering 巻 43, 号 6, p. 1329-1333, 発行日 2004-06 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00913286 | |||||
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収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00333891 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/1.1737375 | |||||
権利 | ||||||
権利情報 | Copyright 2004 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
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値 | publisher |