{"_buckets": {"deposit": "26a8a3bd-4dee-469b-b783-c9364f7c10be"}, "_deposit": {"id": "2205", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "2205"}, "status": "published"}, "_oai": {"id": "oai:niigata-u.repo.nii.ac.jp:00002205", "sets": ["454", "425"]}, "item_5_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2004-06", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "6", "bibliographicPageEnd": "1333", "bibliographicPageStart": "1329", "bibliographicVolumeNumber": "43", "bibliographic_titles": [{"bibliographic_title": "Optical Engineering"}, {"bibliographic_title": "Optical Engineering", "bibliographic_titleLang": "en"}]}]}, "item_5_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "A linear CCD image sensor is used to electrically scan a measuring point and measure 1-D step-profiles in real time with a sinusoidal wavelength-scanning (SWS) interferometer using double feedback control. In this interferometer, the optical path difference (OPD) and the amplitude of the SWS are controlled so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. Two different step profiles with step heights of 1 and 20 μm, respectively, are measured with a measurement error of less than 8 nm. Measuring time for one measuring point is 0.04 s.", "subitem_description_type": "Abstract"}]}, "item_5_publisher_7": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "International Society for Optical Engineering, SPIE"}]}, "item_5_relation_14": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "info:doi/10.1117/1.1737375", "subitem_relation_type_select": "DOI"}}]}, "item_5_rights_15": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright 2004 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited."}]}, "item_5_select_19": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_5_source_id_11": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AA00333891", "subitem_source_identifier_type": "NCID"}]}, "item_5_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "00913286", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Sasaki, Osami"}], "nameIdentifiers": [{"nameIdentifier": "7460", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Honma, Kunihiro"}], "nameIdentifiers": [{"nameIdentifier": "7461", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Suzuki, Takamasa"}], "nameIdentifiers": [{"nameIdentifier": "39", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-07-29"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "43_6_1329-1333.pdf", "filesize": [{"value": "555.2 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 555200.0, "url": {"label": "43_6_1329-1333.pdf", "url": "https://niigata-u.repo.nii.ac.jp/record/2205/files/43_6_1329-1333.pdf"}, "version_id": "ef3b194b-96f7-40fd-a6ba-c7455ef4ed49"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "step-profile measurement", "subitem_subject_scheme": "Other"}, {"subitem_subject": "interferometer", "subitem_subject_scheme": "Other"}, {"subitem_subject": "wavelength scanning", "subitem_subject_scheme": "Other"}, {"subitem_subject": "phase lock", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control"}, {"subitem_title": "Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control", "subitem_title_language": "en"}]}, "item_type_id": "5", "owner": "1", "path": ["454", "425"], "permalink_uri": "http://hdl.handle.net/10191/27597", "pubdate": {"attribute_name": "公開日", "attribute_value": "2014-06-20"}, "publish_date": "2014-06-20", "publish_status": "0", "recid": "2205", "relation": {}, "relation_version_is_last": true, "title": ["Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control"], "weko_shared_id": null}