@article{oai:niigata-u.repo.nii.ac.jp:00002205,
 author = {Sasaki, Osami and Honma, Kunihiro and Suzuki, Takamasa},
 issue = {6},
 journal = {Optical Engineering, Optical Engineering},
 month = {Jun},
 note = {A linear CCD image sensor is used to electrically scan a measuring point and measure 1-D step-profiles in real time with a sinusoidal wavelength-scanning (SWS) interferometer using double feedback control. In this interferometer, the optical path difference (OPD) and the amplitude of the SWS are controlled so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. Two different step profiles with step heights of 1 and 20 μm, respectively, are measured with a measurement error of less than 8 nm. Measuring time for one measuring point is 0.04 s.},
 pages = {1329--1333},
 title = {Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control},
 volume = {43},
 year = {2004}
}