{"created":"2021-03-01T06:05:54.172361+00:00","id":2205,"links":{},"metadata":{"_buckets":{"deposit":"26a8a3bd-4dee-469b-b783-c9364f7c10be"},"_deposit":{"id":"2205","owners":[],"pid":{"revision_id":0,"type":"depid","value":"2205"},"status":"published"},"_oai":{"id":"oai:niigata-u.repo.nii.ac.jp:00002205","sets":["423:424:425","453:454"]},"item_5_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2004-06","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"6","bibliographicPageEnd":"1333","bibliographicPageStart":"1329","bibliographicVolumeNumber":"43","bibliographic_titles":[{"bibliographic_title":"Optical Engineering"},{"bibliographic_title":"Optical Engineering","bibliographic_titleLang":"en"}]}]},"item_5_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"A linear CCD image sensor is used to electrically scan a measuring point and measure 1-D step-profiles in real time with a sinusoidal wavelength-scanning (SWS) interferometer using double feedback control. In this interferometer, the optical path difference (OPD) and the amplitude of the SWS are controlled so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. Two different step profiles with step heights of 1 and 20 μm, respectively, are measured with a measurement error of less than 8 nm. Measuring time for one measuring point is 0.04 s.","subitem_description_type":"Abstract"}]},"item_5_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"International Society for Optical Engineering, SPIE"}]},"item_5_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"info:doi/10.1117/1.1737375","subitem_relation_type_select":"DOI"}}]},"item_5_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright 2004 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited."}]},"item_5_select_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_5_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA00333891","subitem_source_identifier_type":"NCID"}]},"item_5_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"00913286","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Sasaki, Osami"}],"nameIdentifiers":[{"nameIdentifier":"7460","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Honma, Kunihiro"}],"nameIdentifiers":[{"nameIdentifier":"7461","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Suzuki, Takamasa"}],"nameIdentifiers":[{"nameIdentifier":"39","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-07-29"}],"displaytype":"detail","filename":"43_6_1329-1333.pdf","filesize":[{"value":"555.2 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"43_6_1329-1333.pdf","url":"https://niigata-u.repo.nii.ac.jp/record/2205/files/43_6_1329-1333.pdf"},"version_id":"ef3b194b-96f7-40fd-a6ba-c7455ef4ed49"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"step-profile measurement","subitem_subject_scheme":"Other"},{"subitem_subject":"interferometer","subitem_subject_scheme":"Other"},{"subitem_subject":"wavelength scanning","subitem_subject_scheme":"Other"},{"subitem_subject":"phase lock","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control"},{"subitem_title":"Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control","subitem_title_language":"en"}]},"item_type_id":"5","owner":"1","path":["454","425"],"pubdate":{"attribute_name":"公開日","attribute_value":"2014-06-20"},"publish_date":"2014-06-20","publish_status":"0","recid":"2205","relation_version_is_last":true,"title":["Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-15T03:35:03.927190+00:00"}