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Sinusoidal wavelength-scanning interferometric reflectometry
http://hdl.handle.net/10191/27523
http://hdl.handle.net/10191/2752353a7a5fb-d836-4ff2-b0e5-ba3052b29776
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
39_22_3847-3853.pdf (697.0 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Sinusoidal wavelength-scanning interferometric reflectometry | |||||
| タイトル | ||||||
| タイトル | Sinusoidal wavelength-scanning interferometric reflectometry | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
Sasaki, Osami
× Sasaki, Osami× Kuwahara, Tomokazu× Hara, Ryohta× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We propose interferometric reflectometry in which a sinusoidal wavelength-scanning tunable laser diode is used to detect positions and profiles of multiple reflecting surfaces. An objective signal extracted from an interference signal contains modulation amplitude Z and phase alpha, which are related to the positions and profiles, respectively, of multiple reflecting surfaces. By using values of the objective signal at special times, we can produce an image intensity that shows where the reflecting surfaces exist. To obtain exact values of Z or values of alpha, we estimated the objective signal by using a conjugate gradient method. Experimental results show that a resolution of two-optical-path difference (OPD) in the image intensity is approximately 60 microm, and the final OPD precisions are 2 and 8 microm for two and three reflecting surfaces, respectively, for a wavelength-scanning width of 7 nm. Profiles of the front and rear surfaces of a silica glass plate with a thickness of 20 microm have been measured with a precision of approximately 10 nm. | |||||
| 書誌情報 |
Applied Optics en : Applied Optics 巻 39, 号 22, p. 3847-3853, 発行日 2000-08 |
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| 出版者 | ||||||
| 出版者 | Optical Society of America | |||||
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| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00036935 | |||||
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| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00543409 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1364/AO.39.003847 | |||||
| 権利 | ||||||
| 権利情報 | © 2000 Optical Society of America | |||||
| 権利 | ||||||
| 権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.39.003847. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
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| 値 | publisher | |||||
