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Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam
http://hdl.handle.net/10191/27514
http://hdl.handle.net/10191/27514063e07ec-89a8-433b-94d4-acab63f2bb2e
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
43_21_4157-4163.pdf (845.9 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam | |||||
| タイトル | ||||||
| タイトル | Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 著者 |
Shinozaki, Ryo
× Shinozaki, Ryo× Sasaki, Osami× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm. | |||||
| 書誌情報 |
Applied Optics en : Applied Optics 巻 43, 号 21, p. 4157-4163, 発行日 2004-07 |
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| 出版者 | ||||||
| 出版者 | Optical Society of America | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00036935 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00543409 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1364/AO.43.004157 | |||||
| 権利 | ||||||
| 権利情報 | © 2004 Optical Society of America | |||||
| 権利 | ||||||
| 権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.43.004157. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Shinozaki, Ryo, Sasaki, Osami, Suzuki, Takamasa, 2004, Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam: Optical Society of America, 4157–4163 p.
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