{"created":"2021-03-01T06:05:11.559783+00:00","id":1522,"links":{},"metadata":{"_buckets":{"deposit":"52c74b9a-d21a-4f8b-a226-1ecba4a2ab8b"},"_deposit":{"id":"1522","owners":[],"pid":{"revision_id":0,"type":"depid","value":"1522"},"status":"published"},"_oai":{"id":"oai:niigata-u.repo.nii.ac.jp:00001522","sets":["423:424:425","453:454"]},"item_5_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2004-07","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"21","bibliographicPageEnd":"4163","bibliographicPageStart":"4157","bibliographicVolumeNumber":"43","bibliographic_titles":[{"bibliographic_title":"Applied Optics"},{"bibliographic_title":"Applied Optics","bibliographic_titleLang":"en"}]}]},"item_5_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm.","subitem_description_type":"Abstract"}]},"item_5_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Optical Society of America"}]},"item_5_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"info:doi/10.1364/AO.43.004157","subitem_relation_type_select":"DOI"}}]},"item_5_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"© 2004 Optical Society of America"},{"subitem_rights":"This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.43.004157. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law."}]},"item_5_select_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_5_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA00543409","subitem_source_identifier_type":"NCID"}]},"item_5_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"00036935","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Shinozaki, Ryo"}],"nameIdentifiers":[{"nameIdentifier":"4143","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Sasaki, Osami"}],"nameIdentifiers":[{"nameIdentifier":"4144","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Suzuki, Takamasa"}],"nameIdentifiers":[{"nameIdentifier":"39","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-07-29"}],"displaytype":"detail","filename":"43_21_4157-4163.pdf","filesize":[{"value":"845.9 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"43_21_4157-4163.pdf","url":"https://niigata-u.repo.nii.ac.jp/record/1522/files/43_21_4157-4163.pdf"},"version_id":"c285380c-fe10-477d-b557-647d2b4548a2"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam"},{"subitem_title":"Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam","subitem_title_language":"en"}]},"item_type_id":"5","owner":"1","path":["454","425"],"pubdate":{"attribute_name":"公開日","attribute_value":"2014-06-20"},"publish_date":"2014-06-20","publish_status":"0","recid":"1522","relation_version_is_last":true,"title":["Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-15T03:34:07.873198+00:00"}