@article{oai:niigata-u.repo.nii.ac.jp:00001522,
 author = {Shinozaki, Ryo and Sasaki, Osami and Suzuki, Takamasa},
 issue = {21},
 journal = {Applied Optics, Applied Optics},
 month = {Jul},
 note = {A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm.},
 pages = {4157--4163},
 title = {Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam},
 volume = {43},
 year = {2004}
}