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CVD法によるTiC-SiC系被覆膜の残留応力
http://hdl.handle.net/10191/5705
http://hdl.handle.net/10191/5705af2c29b8-ded4-4f6a-ba7e-392190fa65ab
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
9_0003.pdf (495.5 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2008-04-08 | |||||
| タイトル | ||||||
| タイトル | CVD法によるTiC-SiC系被覆膜の残留応力 | |||||
| タイトル | ||||||
| タイトル | CVD法によるTiC-SiC系被覆膜の残留応力 | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Experimental Stress Analysis | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Residual Stress | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Ceramics | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Thermal Stress | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | CVD Coating | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | X-Ray Stress Measurement | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Phase Stress | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| その他のタイトル | ||||||
| その他のタイトル | Residual Stress of TiC-SiC Composite Film Coated by Chemical Vapor Deposition | |||||
| 著者 |
鈴木, 賢治
× 鈴木, 賢治× 田中, 啓介× 河合, 千尋 |
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| 著者別名 | ||||||
| 識別子Scheme | WEKO | |||||
| 識別子 | 44705 | |||||
| 姓名 | Suzuki, Kenji | |||||
| 著者別名 | ||||||
| 識別子Scheme | WEKO | |||||
| 識別子 | 44706 | |||||
| 姓名 | Tanaka, Keisuke | |||||
| 著者別名 | ||||||
| 識別子Scheme | WEKO | |||||
| 識別子 | 44707 | |||||
| 姓名 | Kawai, Chihiro | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | X-Ray stress measurement was applied to TiC and SiC monolithic films and TiC/SiC composite films coated by CVD process on graphite substrates. Textures of films were examined by the X-ray diffraction method. TiC coating had preferential growth of the (2 2 0) plane. SiC coating had preferential growth of the (1 1 1) plane. TiC/SiC composite coating showed a strong texture of the (2 2 0) plane perpendicular to the substrate surface. The diffractions from TiC (3 3 1) and SiC (3 3 1) planes by Fe-Kα characteristic X-rays are suited for X-ray residual stress measurement in thin films. In TiC/SiC composite coating, X-ray diffraction profiles from the TiC phase and SiC phase overlap. These line profiles were separated into TiC and SiC line profiles by the modified DFP method. Phase stresses in the TiC phase and SiC phase in TiC/SiC composite coating showed a triaxial stress state. The measured residual stress of the TiC phase is tensile and that of the SiC phase is compressive. Although the surface residual stress in SiC monolithic coating with thicknesses below 30μm was compressive, the residual stress was tensile for thick coating, and increased with increasing film thickness. | |||||
| 書誌情報 |
日本機械学会論文集. A編 en : 日本機械学会論文集. A編 巻 58, 号 555, p. 2172-2178, 発行日 1992-11 |
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| 出版者 | ||||||
| 出版者 | 日本機械学会 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 03875008 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN0018742X | |||||
| 権利 | ||||||
| 権利情報 | 日本機械学会 | |||||
| 権利 | ||||||
| 権利情報 | 本文データは学会の許諾に基づくCiNiiからの複製である | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| 異版である | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://ci.nii.ac.jp/naid/110002371286 | |||||
