{"created":"2021-03-01T06:07:27.448643+00:00","id":3691,"links":{},"metadata":{"_buckets":{"deposit":"38d67c3f-251b-470e-83c6-d471c85d68bc"},"_deposit":{"id":"3691","owners":[],"pid":{"revision_id":0,"type":"depid","value":"3691"},"status":"published"},"_oai":{"id":"oai:niigata-u.repo.nii.ac.jp:00003691","sets":["423:424:425","453:454"]},"item_5_alternative_title_1":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Residual Stress of TiC-SiC Composite Film Coated by Chemical Vapor Deposition"}]},"item_5_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1992-11","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"555","bibliographicPageEnd":"2178","bibliographicPageStart":"2172","bibliographicVolumeNumber":"58","bibliographic_titles":[{"bibliographic_title":"日本機械学会論文集. A編"},{"bibliographic_title":"日本機械学会論文集. A編","bibliographic_titleLang":"en"}]}]},"item_5_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"X-Ray stress measurement was applied to TiC and SiC monolithic films and TiC/SiC composite films coated by CVD process on graphite substrates. Textures of films were examined by the X-ray diffraction method. TiC coating had preferential growth of the (2 2 0) plane. SiC coating had preferential growth of the (1 1 1) plane. TiC/SiC composite coating showed a strong texture of the (2 2 0) plane perpendicular to the substrate surface. The diffractions from TiC (3 3 1) and SiC (3 3 1) planes by Fe-Kα characteristic X-rays are suited for X-ray residual stress measurement in thin films. In TiC/SiC composite coating, X-ray diffraction profiles from the TiC phase and SiC phase overlap. These line profiles were separated into TiC and SiC line profiles by the modified DFP method. Phase stresses in the TiC phase and SiC phase in TiC/SiC composite coating showed a triaxial stress state. The measured residual stress of the TiC phase is tensile and that of the SiC phase is compressive. Although the surface residual stress in SiC monolithic coating with thicknesses below 30μm was compressive, the residual stress was tensile for thick coating, and increased with increasing film thickness.","subitem_description_type":"Abstract"}]},"item_5_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"44705","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Suzuki, Kenji"}]},{"nameIdentifiers":[{"nameIdentifier":"44706","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Tanaka, Keisuke"}]},{"nameIdentifiers":[{"nameIdentifier":"44707","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Kawai, Chihiro"}]}]},"item_5_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"日本機械学会"}]},"item_5_relation_31":{"attribute_name":"異版である","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"http://ci.nii.ac.jp/naid/110002371286","subitem_relation_type_select":"URI"}}]},"item_5_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"日本機械学会"},{"subitem_rights":"本文データは学会の許諾に基づくCiNiiからの複製である"}]},"item_5_select_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_5_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN0018742X","subitem_source_identifier_type":"NCID"}]},"item_5_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"03875008","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"鈴木, 賢治"}],"nameIdentifiers":[{"nameIdentifier":"44702","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"田中, 啓介"}],"nameIdentifiers":[{"nameIdentifier":"44703","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"河合, 千尋"}],"nameIdentifiers":[{"nameIdentifier":"44704","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-07-30"}],"displaytype":"detail","filename":"9_0003.pdf","filesize":[{"value":"495.5 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"9_0003.pdf","url":"https://niigata-u.repo.nii.ac.jp/record/3691/files/9_0003.pdf"},"version_id":"dab9748a-af22-4e65-85fa-dbfb5fbc1e1b"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Experimental Stress Analysis","subitem_subject_scheme":"Other"},{"subitem_subject":"Residual Stress","subitem_subject_scheme":"Other"},{"subitem_subject":"Ceramics","subitem_subject_scheme":"Other"},{"subitem_subject":"Thermal Stress","subitem_subject_scheme":"Other"},{"subitem_subject":"CVD Coating","subitem_subject_scheme":"Other"},{"subitem_subject":"X-Ray Stress Measurement","subitem_subject_scheme":"Other"},{"subitem_subject":"Phase Stress","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"CVD法によるTiC-SiC系被覆膜の残留応力","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"CVD法によるTiC-SiC系被覆膜の残留応力"},{"subitem_title":"CVD法によるTiC-SiC系被覆膜の残留応力","subitem_title_language":"en"}]},"item_type_id":"5","owner":"1","path":["454","425"],"pubdate":{"attribute_name":"公開日","attribute_value":"2008-04-08"},"publish_date":"2008-04-08","publish_status":"0","recid":"3691","relation_version_is_last":true,"title":["CVD法によるTiC-SiC系被覆膜の残留応力"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-15T03:36:48.703422+00:00"}