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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Phase-locked laser diode interferometer

http://hdl.handle.net/10191/27475
http://hdl.handle.net/10191/27475
9f90deb4-ffa9-40b2-8968-ec8479049ff9
名前 / ファイル ライセンス アクション
1553_77-83.pdf 1553_77-83.pdf (475.6 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Phase-locked laser diode interferometer
タイトル
言語 en
タイトル Phase-locked laser diode interferometer
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 169545

Sasaki, Osami

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
Higuchi, Katsuhiro

× Higuchi, Katsuhiro

WEKO 169547

Higuchi, Katsuhiro

Search repository
抄録
内容記述タイプ Abstract
内容記述 We propose a phase locked interferometer where tunability of the wavelength of a laser diode is utilized. A CCD image sensor detects an interference signal electrically scanning a measuring point along a surface of an object. The phase of the interference signal changes according to the surface profile. This phase is kept at a constant value by controlling the injection current of the laser diode with a feedback control system. The surface profile is obtained from the change in the injection current. The feedback signal is generated directly from the output of the CCD image sensor, which enables us to make high-speed measurements in real time. The scanning time required to complete the measurement for one measuring point was from approximately 2 msec to approximately 10 msec. External disturbances such as mechanical vibrations cause phase variations in the interference signal, and accurate measurements become impossible. Detection of the phase variation at a fixed point on the surface of the object is added to the phase locked interferometer. The feedback control of the injection current is done alternately for the fixed point and the measuring point. An exact surface profile is obtained by subtracting the phase variation detected at the fixed point from the surface profile detected at the measuring points. We could improve the measurement accuracy from approximately 20 nm to approximately 5 nm in surface profile measurements of diamond turned aluminum disks.
内容記述
内容記述タイプ Other
内容記述 Laser interferometry 4 : computer-aided interferometry : 4th International conference : Jul 1991, San Diego, CA
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 1553, p. 77-83, 発行日 1992-01
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.135358
権利
権利情報 Copyright 1992 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
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