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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Sinusoidal wavelength-scanning interferometric reflectometry

http://hdl.handle.net/10191/27478
http://hdl.handle.net/10191/27478
fb39061a-5f78-4db6-84fd-3c57df39a8ee
名前 / ファイル ライセンス アクション
3740_618-621.pdf 3740_618-621.pdf (400.3 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Sinusoidal wavelength-scanning interferometric reflectometry
タイトル
言語 en
タイトル Sinusoidal wavelength-scanning interferometric reflectometry
言語
言語 eng
キーワード
主題Scheme Other
主題 reflectometry
キーワード
主題Scheme Other
主題 nterferometry
キーワード
主題Scheme Other
主題 wavelength scanning
キーワード
主題Scheme Other
主題 thickness measurement
キーワード
主題Scheme Other
主題 surface profile measurement
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 169521

Sasaki, Osami

Search repository
Kuwahara, Tomokazu

× Kuwahara, Tomokazu

WEKO 169522

Kuwahara, Tomokazu

Search repository
Hara, Ryohta

× Hara, Ryohta

WEKO 169523

Hara, Ryohta

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 We propose an interferometric reflectometry using a sinusoidal wavelength-scanning tunable laser diode to detect positions and profiles of multiple reflecting surfaces. An objective signal extracted from an interference signal contains the modulation amplitude Z and the phase (alpha) which are related to positions and profiles of multiple reflecting surfaces, respectively. By using values of the object signal at special times, we can produce an image intensity which shows where the reflecting surfaces exist. To obtain exact values of Z or values of (alpha) the objective signal is estimated with a conjugate gradient method. Experiments results show that a resolution of two-optical path difference (OPD) in the image intensity is 87 micrometer, and a final OPD accuracy is 2 micrometer and 8 micrometer for the two and three reflecting surfaces, respectively, in the case of the wavelength-scanning width of 7 nm. Profiles of front and rear surfaces of a silica glass plate with thickness of 20 micrometer are measured with an accuracy of about 10 nm.
内容記述
内容記述タイプ Other
内容記述 Optical engineering for sensing and nanotechnology : International conference on optical sensing and nanotechnology : Jun 1999, Yokohama, Japan
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 3740, p. 618-621, 発行日 1999-06
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.347759
権利
権利情報 Copyright 1999 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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