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Sinusoidal wavelength-scanning interferometric reflectometry
http://hdl.handle.net/10191/27478
http://hdl.handle.net/10191/27478fb39061a-5f78-4db6-84fd-3c57df39a8ee
名前 / ファイル | ライセンス | アクション |
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3740_618-621.pdf (400.3 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Sinusoidal wavelength-scanning interferometric reflectometry | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Sinusoidal wavelength-scanning interferometric reflectometry | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | reflectometry | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | nterferometry | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | wavelength scanning | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | thickness measurement | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | surface profile measurement | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_5794 | |||||
タイプ | conference paper | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Kuwahara, Tomokazu× Hara, Ryohta× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We propose an interferometric reflectometry using a sinusoidal wavelength-scanning tunable laser diode to detect positions and profiles of multiple reflecting surfaces. An objective signal extracted from an interference signal contains the modulation amplitude Z and the phase (alpha) which are related to positions and profiles of multiple reflecting surfaces, respectively. By using values of the object signal at special times, we can produce an image intensity which shows where the reflecting surfaces exist. To obtain exact values of Z or values of (alpha) the objective signal is estimated with a conjugate gradient method. Experiments results show that a resolution of two-optical path difference (OPD) in the image intensity is 87 micrometer, and a final OPD accuracy is 2 micrometer and 8 micrometer for the two and three reflecting surfaces, respectively, in the case of the wavelength-scanning width of 7 nm. Profiles of front and rear surfaces of a silica glass plate with thickness of 20 micrometer are measured with an accuracy of about 10 nm. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Optical engineering for sensing and nanotechnology : International conference on optical sensing and nanotechnology : Jun 1999, Yokohama, Japan | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 3740, p. 618-621, 発行日 1999-06 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.347759 | |||||
権利 | ||||||
権利情報 | Copyright 1999 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
著者版フラグ | ||||||
値 | publisher |