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Silicon-Based Integrated Optical Pressure Sensor Using Intermodal Interference between TM-like and TE-like Modes
http://hdl.handle.net/10191/31188
http://hdl.handle.net/10191/3118873208f47-6149-4e1d-b9d4-42a3b09a126a
名前 / ファイル | ライセンス | アクション |
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-12-24 | |||||
タイトル | ||||||
タイトル | Silicon-Based Integrated Optical Pressure Sensor Using Intermodal Interference between TM-like and TE-like Modes | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Silicon-Based Integrated Optical Pressure Sensor Using Intermodal Interference between TM-like and TE-like Modes | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | integrated optics | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | intermodal interference | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | pressure sensor | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | silicon | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | diaphragm | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_5794 | |||||
タイプ | conference paper | |||||
著者 |
Shirai, Yuki
× Shirai, Yuki× Goto, Takeshi× Ohkawa, Masashi× Sekine, Seishi× Sato, Takashi |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A silicon-based integrated optical pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes is described. The sensor consists of a micromachiend rectangular diaphragm and a straight polystyrene optical waveguide passing across the diaphragm. The use of the intermodal interference has the potential advantage of shortening the sensor length since it needs neither a Y-branch nor a 3-dB coupler. In the presence of the pressure difference on the diaphragm, the phase difference is yielded between the two guided modes by an anisotropic index change induced by the elasto-optic effect. The phase difference is finally transformed into a change in light intensity by an analyzing polarizer. We fabricated a sensor with a 1.2 mm by 10 mm by 20 micrometers diaphragm over which the waveguides were formed at 50 micrometers intervals. In the experiment, a linearly-polarized He-Ne laser beam at 633 nm was coupled to the two guided modes at equal intensity. The output intensity through a polarizer was sinusoidally changed at a period of 64 kPa, corresponding to a phase sensitivity of 98 mrad/lPa, for the waveguide nearest to the diaphragm edge. The measurement was carried out for other waveguide positions. The largest sensitivity was obtained for the waveguide nearest to the diaphragm edge as theoretically expected. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Integrated optics devices 5 : Conference : Jan 2001, San Jose, CA | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 4277, p. 411-418, 発行日 2001-03 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.426824 | |||||
権利 | ||||||
権利情報 | Copyright 2001 Society of Photo-Optical Instrumentation Engineers | |||||
著者版フラグ | ||||||
値 | publisher |