WEKO3
アイテム
High-speed sinusoidal phase modulating laser diode interferometer with a feedback control to eliminate external disturbance
http://hdl.handle.net/10191/27489
http://hdl.handle.net/10191/274891e7d82a2-1539-4481-ba31-bcdd2661b804
名前 / ファイル | ライセンス | アクション |
---|---|---|
4416_392-395.pdf (398.8 kB)
|
|
Item type | 会議発表論文 / Conference Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | High-speed sinusoidal phase modulating laser diode interferometer with a feedback control to eliminate external disturbance | |||||
タイトル | ||||||
タイトル | High-speed sinusoidal phase modulating laser diode interferometer with a feedback control to eliminate external disturbance | |||||
言語 | en | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometer | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | bucket method | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | laser diode | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | sinusoidal phase modulation | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | electronic shutter | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Maki, Toshiyuki× Sasaki, Osami |
|||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A surface profiler incorporating a feedback controller that eliminates external disturbances is proposed and demonstrated. Its overall performance is dependent upon the frequency response of the feedback loop. The frequency of modulating signal strongly influences response of the feedback controller. When using an integrating bucket method, however, the CCD camera must be operated at the NTSC-approved modulating frequency. Our technique uses electronic shutter equipped CCD camera. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating bucket method under the NTSC standards. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001 : Yokohama, Japan. : Jun 2001, Yokohama, Japan | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 4416, p. 392-395, 発行日 2001-06 |
|||||
出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.427093 | |||||
権利 | ||||||
権利情報 | Copyright 2001 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
著者版フラグ | ||||||
値 | publisher |