@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031061, author = {Suzuki, Takamasa and Maki, Toshiyuki and Sasaki, Osami}, book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering}, month = {Jun}, note = {A surface profiler incorporating a feedback controller that eliminates external disturbances is proposed and demonstrated. Its overall performance is dependent upon the frequency response of the feedback loop. The frequency of modulating signal strongly influences response of the feedback controller. When using an integrating bucket method, however, the CCD camera must be operated at the NTSC-approved modulating frequency. Our technique uses electronic shutter equipped CCD camera. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating bucket method under the NTSC standards., Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001 : Yokohama, Japan. : Jun 2001, Yokohama, Japan}, pages = {392--395}, publisher = {International Society for Optical Engineering, SPIE}, title = {High-speed sinusoidal phase modulating laser diode interferometer with a feedback control to eliminate external disturbance}, volume = {4416}, year = {2001} }