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Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement
http://hdl.handle.net/10191/27493
http://hdl.handle.net/10191/27493efce9c89-3aa5-4e52-8aed-025a6dfe3aee
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4919_220-226.pdf (591.2 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement | |||||
タイトル | ||||||
タイトル | Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement | |||||
言語 | en | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometer | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | wavelength-scanning | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | step-profile measurement | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | CCD image sensor | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Shimakura, Yasuhisa× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Two-dimensional step-profile measurement is carried out with a sinusoidal wavelength-scanning interferometer where a large scanning width of 41 nm is easily achieved using a superluminescent laser diode of a wide spectral bandwidth of 46 nm. To detect a time-varying interference signal with a short integration time of 118 μs, a shutter function of a two-dimensional CCD image sensor is utilized. A step profile with a step height of 1 μm is measured with an error less than a few nanometers. A Step profile with a step height of 20 μm is also measured with a scanning width of 23 nm. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. : Oct 2002, Shanghai, China | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 4919, p. 220-226, 発行日 2002-10 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
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収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.465815 | |||||
権利 | ||||||
権利情報 | Copyright 2002 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
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値 | publisher |