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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement

http://hdl.handle.net/10191/27493
http://hdl.handle.net/10191/27493
efce9c89-3aa5-4e52-8aed-025a6dfe3aee
名前 / ファイル ライセンス アクション
4919_220-226.pdf 4919_220-226.pdf (591.2 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement
タイトル
言語 en
タイトル Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement
言語
言語 eng
キーワード
主題Scheme Other
主題 interferometer
キーワード
主題Scheme Other
主題 wavelength-scanning
キーワード
主題Scheme Other
主題 step-profile measurement
キーワード
主題Scheme Other
主題 CCD image sensor
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 169464

Sasaki, Osami

Search repository
Shimakura, Yasuhisa

× Shimakura, Yasuhisa

WEKO 169465

Shimakura, Yasuhisa

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 Two-dimensional step-profile measurement is carried out with a sinusoidal wavelength-scanning interferometer where a large scanning width of 41 nm is easily achieved using a superluminescent laser diode of a wide spectral bandwidth of 46 nm. To detect a time-varying interference signal with a short integration time of 118 μs, a shutter function of a two-dimensional CCD image sensor is utilized. A step profile with a step height of 1 μm is measured with an error less than a few nanometers. A Step profile with a step height of 20 μm is also measured with a scanning width of 23 nm.
内容記述
内容記述タイプ Other
内容記述 Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. : Oct 2002, Shanghai, China
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 4919, p. 220-226, 発行日 2002-10
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.465815
権利
権利情報 Copyright 2002 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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