@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031051,
 author = {Sasaki, Osami and Shimakura, Yasuhisa and Suzuki, Takamasa},
 book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering},
 month = {Oct},
 note = {Two-dimensional step-profile measurement is carried out with a sinusoidal wavelength-scanning interferometer where a large scanning width of 41 nm is easily achieved using a superluminescent laser diode of a wide spectral bandwidth of 46 nm. To detect a time-varying interference signal with a short integration time of 118 μs, a shutter function of a two-dimensional CCD image sensor is utilized. A step profile with a step height of 1 μm is measured with an error less than a few nanometers. A Step profile with a step height of 20 μm is also measured with a scanning width of 23 nm., Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. : Oct 2002, Shanghai, China},
 pages = {220--226},
 publisher = {International Society for Optical Engineering, SPIE},
 title = {Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement},
 volume = {4919},
 year = {2002}
}