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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Multiple-period fringe projection interferometry using a back-propagation method for surface measurement of glass plate

http://hdl.handle.net/10191/27497
505211e1-79ae-402d-8f8e-6339b02fd08d
プレビュー
名前 / ファイル ライセンス Actions
6829_68290C.pdf 6829_68290C.pdf (473.4 kB)
item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Multiple-period fringe projection interferometry using a back-propagation method for surface measurement of glass plate
タイトル
言語 en
タイトル Multiple-period fringe projection interferometry using a back-propagation method for surface measurement of glass plate
言語
言語 eng
キーワード
主題Scheme Other
主題 back-propagation method
キーワード
主題Scheme Other
主題 multi-period fringe projection
キーワード
主題Scheme Other
主題 shape of glass plate
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Huan, Hai

× Huan, Hai

WEKO 169411

Huan, Hai

Search repository
Sasaki, Osami

× Sasaki, Osami

WEKO 169412

Sasaki, Osami

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 A multi-period fringe-projection interferometry with back-propagation method is described to measure surface profiles of a glass plate. Phase distribution of the multi-period fringe formed by interfering the two calumniated laser beams is utilized to determine the position of the two surfaces of the glass plate. The multiple optical fields of the different fringe periods on the two surfaces, which are obtained from the sinusoidal phase-modulated interference signals, are back-propagated to a position where all of the phases of the multiple optical fields become zero. At the same time, the amplitude of the sum of the multiple back-propagated fields becomes maximum. The distances of the back-propagation provide the positions of the two surfaces of the glass plate. In the experiment a glass plates of 2mm-thickness is measured with a precision of 2.3μm.
内容記述
内容記述タイプ Other
内容記述 Advanced materials and devices for sensing and imaging 3 : 12-14 November 2007 : Beijing, China. : Nov 2007, Beijing, China
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 6829, p. 68290C-1-68290C-7, 発行日 2007-11
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
関連識別子
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.768064
権利
権利情報 Copyright 2007 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
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