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Multiple-period fringe projection interferometry using a back-propagation method for surface measurement of glass plate
http://hdl.handle.net/10191/27497
505211e1-79ae-402d-8f8e-6339b02fd08d
名前 / ファイル | ライセンス | Actions | |
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item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Multiple-period fringe projection interferometry using a back-propagation method for surface measurement of glass plate | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Multiple-period fringe projection interferometry using a back-propagation method for surface measurement of glass plate | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | back-propagation method | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | multi-period fringe projection | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | shape of glass plate | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_5794 | |||||
タイプ | conference paper | |||||
著者 |
Huan, Hai
× Huan, Hai× Sasaki, Osami× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A multi-period fringe-projection interferometry with back-propagation method is described to measure surface profiles of a glass plate. Phase distribution of the multi-period fringe formed by interfering the two calumniated laser beams is utilized to determine the position of the two surfaces of the glass plate. The multiple optical fields of the different fringe periods on the two surfaces, which are obtained from the sinusoidal phase-modulated interference signals, are back-propagated to a position where all of the phases of the multiple optical fields become zero. At the same time, the amplitude of the sum of the multiple back-propagated fields becomes maximum. The distances of the back-propagation provide the positions of the two surfaces of the glass plate. In the experiment a glass plates of 2mm-thickness is measured with a precision of 2.3μm. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Advanced materials and devices for sensing and imaging 3 : 12-14 November 2007 : Beijing, China. : Nov 2007, Beijing, China | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 6829, p. 68290C-1-68290C-7, 発行日 2007-11 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
関連識別子 | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.768064 | |||||
権利 | ||||||
権利情報 | Copyright 2007 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
著者版フラグ | ||||||
値 | publisher |