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  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer

http://hdl.handle.net/10191/27467
http://hdl.handle.net/10191/27467
a252a7fa-5ebb-4f6e-9221-0e7ad53f8a40
名前 / ファイル ライセンス アクション
7432_74320J.pdf 7432_74320J.pdf (2.6 MB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-06-20
タイトル
タイトル Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer
タイトル
言語 en
タイトル Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer
言語
言語 eng
キーワード
主題Scheme Other
主題 inner surface
キーワード
主題Scheme Other
主題 profile measurement
キーワード
主題Scheme Other
主題 interferometer
キーワード
主題Scheme Other
主題 two-wavelength
キーワード
主題Scheme Other
主題 oblique incidence
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Sasaki, Osami

× Sasaki, Osami

WEKO 169400

Sasaki, Osami

Search repository
Yamamura, Ryota

× Yamamura, Ryota

WEKO 169401

Yamamura, Ryota

Search repository
Yokoyama, Kazushi

× Yokoyama, Kazushi

WEKO 169402

Yokoyama, Kazushi

Search repository
Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
抄録
内容記述タイプ Abstract
内容記述 A collimated line beam is incident at an oblique incident angle of 0.61 rad into an inner surface of a hydrodynamic bearing whose inner diameter and length are 3 mm and 3.5 mm, respectively. Lights reflected in specified directions from the inner surface are selected to obtain an optical field whose phase distribution is proportional to the inner surface profile. This optical field interferes with a reference optical field in a two-wavelength interferometer using a tunable external cavity laser diode. Shapes of grooves with depth of about 5 μm and width of about 0.15 mm formed on the inner surface can be measured with an error less than 0.3 μm.
内容記述
内容記述タイプ Other
内容記述 Optical inspection and metrology for non-optics industries : 3-4 August 2009 : San Diego, California, United States. : Aug 2009, San Diego, CA.
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 7432, p. 74320J-1-74320J-5, 発行日 2009-08
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.827352
権利
権利情報 Copyright 2009 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
著者版フラグ
値 publisher
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