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Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer
http://hdl.handle.net/10191/27467
http://hdl.handle.net/10191/27467a252a7fa-5ebb-4f6e-9221-0e7ad53f8a40
名前 / ファイル | ライセンス | アクション |
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | inner surface | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | profile measurement | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometer | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | two-wavelength | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | oblique incidence | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_5794 | |||||
タイプ | conference paper | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Yamamura, Ryota× Yokoyama, Kazushi× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A collimated line beam is incident at an oblique incident angle of 0.61 rad into an inner surface of a hydrodynamic bearing whose inner diameter and length are 3 mm and 3.5 mm, respectively. Lights reflected in specified directions from the inner surface are selected to obtain an optical field whose phase distribution is proportional to the inner surface profile. This optical field interferes with a reference optical field in a two-wavelength interferometer using a tunable external cavity laser diode. Shapes of grooves with depth of about 5 μm and width of about 0.15 mm formed on the inner surface can be measured with an error less than 0.3 μm. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Optical inspection and metrology for non-optics industries : 3-4 August 2009 : San Diego, California, United States. : Aug 2009, San Diego, CA. | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 7432, p. 74320J-1-74320J-5, 発行日 2009-08 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.827352 | |||||
権利 | ||||||
権利情報 | Copyright 2009 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
著者版フラグ | ||||||
値 | publisher |