@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031034,
 author = {Sasaki, Osami and Yamamura, Ryota and Yokoyama, Kazushi and Suzuki, Takamasa},
 book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering},
 month = {Aug},
 note = {A collimated line beam is incident at an oblique incident angle of 0.61 rad into an inner surface of a hydrodynamic bearing whose inner diameter and length are 3 mm and 3.5 mm, respectively. Lights reflected in specified directions from the inner surface are selected to obtain an optical field whose phase distribution is proportional to the inner surface profile. This optical field interferes with a reference optical field in a two-wavelength interferometer using a tunable external cavity laser diode. Shapes of grooves with depth of about 5 μm and width of about 0.15 mm formed on the inner surface can be measured with an error less than 0.3 μm., Optical inspection and metrology for non-optics industries : 3-4 August 2009 : San Diego, California, United States. : Aug 2009, San Diego, CA.},
 pages = {74320J-1--74320J-5},
 publisher = {International Society for Optical Engineering, SPIE},
 title = {Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer},
 volume = {7432},
 year = {2009}
}