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Multiple-wavelength interferometers using backpropagation of optical fields for profile measurement of thin glass sheets
http://hdl.handle.net/10191/27468
http://hdl.handle.net/10191/274682b105c0e-0763-4132-a250-858b063f68d6
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
7790_77900U.pdf (1.7 MB)
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| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-06-20 | |||||
| タイトル | ||||||
| タイトル | Multiple-wavelength interferometers using backpropagation of optical fields for profile measurement of thin glass sheets | |||||
| タイトル | ||||||
| タイトル | Multiple-wavelength interferometers using backpropagation of optical fields for profile measurement of thin glass sheets | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | multiple wavelengths | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | interferometer | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | shape measurement | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | backpropagation of optical field | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| 著者 |
Sasaki, Osami
× Sasaki, Osami× Samuel, Choi× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Multiple-wavelength optical fields at a detecting plane of an interferometer are generated by a computer from the detected interference signals of a thin glass sheet. The generated optical fields are backpropagated towards the glass sheet along the optical axis. An optical field along the optical axis is reconstructed by summing the backpropagated fields over the multiple wavelengths. The amplitude and phase distributions of the reconstructed optical field provide the positions of the two surfaces of the glass sheet where peak values of the amplitude and zero or π values of the phase appear. The accuracy of the position measurement is several nanometers. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | Interferometry 15: techniques and analysis : 2-4 August 2010 : San Diego, California, United States. : 15th interferometry conference : SPIE 55th annual meeting : Aug 2010, San Diego, CA | |||||
| 書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 7790, p. 77900U-1-77900U-7, 発行日 2010-08 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0277786X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10619755 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.861534 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 2010 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
