@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031031, author = {Sasaki, Osami and Samuel, Choi and Suzuki, Takamasa}, book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering}, month = {Aug}, note = {Multiple-wavelength optical fields at a detecting plane of an interferometer are generated by a computer from the detected interference signals of a thin glass sheet. The generated optical fields are backpropagated towards the glass sheet along the optical axis. An optical field along the optical axis is reconstructed by summing the backpropagated fields over the multiple wavelengths. The amplitude and phase distributions of the reconstructed optical field provide the positions of the two surfaces of the glass sheet where peak values of the amplitude and zero or π values of the phase appear. The accuracy of the position measurement is several nanometers., Interferometry 15: techniques and analysis : 2-4 August 2010 : San Diego, California, United States. : 15th interferometry conference : SPIE 55th annual meeting : Aug 2010, San Diego, CA}, pages = {77900U-1--77900U-7}, publisher = {International Society for Optical Engineering, SPIE}, title = {Multiple-wavelength interferometers using backpropagation of optical fields for profile measurement of thin glass sheets}, volume = {7790}, year = {2010} }