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Profile measurement of thin films by linear wavenumber-scanning interferometry
http://hdl.handle.net/10191/31152
http://hdl.handle.net/10191/31152f28e5eb0-d3f5-4af5-b7d3-82c8e9e3e640
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
8133_81330K.pdf (4.3 MB)
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| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-12-18 | |||||
| タイトル | ||||||
| タイトル | Profile measurement of thin films by linear wavenumber-scanning interferometry | |||||
| タイトル | ||||||
| タイトル | Profile measurement of thin films by linear wavenumber-scanning interferometry | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | multiple wavelengths | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | linear wavenumber-scanning | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | interferometer | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | profile measurement | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_5794 | |||||
| タイプ | conference paper | |||||
| 著者 |
Sasaki, Osami
× Sasaki, Osami× Hirakubo, Satoshi× Choi, Samuel× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Conventional methods to measure the positions of the front and rear surfaces of thin films with multiplewavelength interferometers are reviewed to make it clear how the method proposed here is novel and simple. Characteristics of the linear wavenumber-scanning interferometry used in the proposed method are analyzed in detail to make the measurement accuracy clearly. The positions of the front and rear surfaces of a silicon dioxide film with 4μm thickness is measured by utilizing the phases of the sinusoidal waves forms corresponding to each of the optical path differences contained in the interference signal. The experiments and the theoretical analysis show that the measurement error is about 15 nm. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | Dimensional Optical Metrology and Inspection for Practical Applications San Diego, California, USA, August 21, 2011 | |||||
| 書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 8133, p. 81330K-1-81330K-8, 発行日 2011-09 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0277786X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10619755 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.894454 | |||||
| 権利 | ||||||
| 権利情報 | Copyright(C)2011 Society of Photo-Optical Instrumentation Engineers | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
