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{"_buckets": {"deposit": "ef71b25a-41b4-433d-bd0d-f619160a0939"}, "_deposit": {"id": "31020", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "31020"}, "status": "published"}, "_oai": {"id": "oai:niigata-u.repo.nii.ac.jp:00031020", "sets": ["457", "1827"]}, "item_8_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2012-11", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "85630K-6", "bibliographicPageStart": "85630K-1", "bibliographicVolumeNumber": "8563", "bibliographic_titles": [{"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering"}, {"bibliographic_title": "Proceedings of SPIE - the International Society for Optical Engineering", "bibliographic_titleLang": "en"}]}]}, "item_8_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 μm and 50 nm for displacements of 150 μm and 1.2 μm, respectively.", "subitem_description_type": "Abstract"}]}, "item_8_description_5": {"attribute_name": "内容記述", "attribute_value_mlt": [{"subitem_description": "Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China", "subitem_description_type": "Other"}]}, "item_8_publisher_7": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "International Society for Optical Engineering, SPIE"}]}, "item_8_relation_14": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "info:doi/10.1117/12.999720", "subitem_relation_type_select": "DOI"}}]}, "item_8_rights_15": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers"}]}, "item_8_select_19": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_8_source_id_11": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AA10619755", "subitem_source_identifier_type": "NCID"}]}, "item_8_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0277786X", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Suzuki, Takamasa"}], "nameIdentifiers": [{"nameIdentifier": "39", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Yamada, Noriaki"}], "nameIdentifiers": [{"nameIdentifier": "169340", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sasaki, Osami"}], "nameIdentifiers": [{"nameIdentifier": "169341", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Choi, Samuel"}], "nameIdentifiers": [{"nameIdentifier": "169342", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-08-26"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "8563_85630K.pdf", "filesize": [{"value": "4.6 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 4600000.0, "url": {"label": "8563_85630K.pdf", "url": "https://niigata-u.repo.nii.ac.jp/record/31020/files/8563_85630K.pdf"}, "version_id": "8e2ad2f8-2ce5-4fd5-846f-fb2a343ce177"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "displacement sensor", "subitem_subject_scheme": "Other"}, {"subitem_subject": "laser diode", "subitem_subject_scheme": "Other"}, {"subitem_subject": "interferometer", "subitem_subject_scheme": "Other"}, {"subitem_subject": "vertical cavity surface emitting laser diode", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "Real-time displacement measurement using VCSEL interferometer", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Real-time displacement measurement using VCSEL interferometer"}, {"subitem_title": "Real-time displacement measurement using VCSEL interferometer", "subitem_title_language": "en"}]}, "item_type_id": "8", "owner": "1", "path": ["457", "1827"], "permalink_uri": "http://hdl.handle.net/10191/31149", "pubdate": {"attribute_name": "公開日", "attribute_value": "2014-12-18"}, "publish_date": "2014-12-18", "publish_status": "0", "recid": "31020", "relation": {}, "relation_version_is_last": true, "title": ["Real-time displacement measurement using VCSEL interferometer"], "weko_shared_id": null}
  1. 060 工学部
  2. 40 学会発表資料
  3. 06 SPIE
  1. 0 資料タイプ別
  2. 04 会議発表論文

Real-time displacement measurement using VCSEL interferometer

http://hdl.handle.net/10191/31149
http://hdl.handle.net/10191/31149
122f1c83-d224-4564-a269-7c808d5ca535
名前 / ファイル ライセンス アクション
8563_85630K.pdf 8563_85630K.pdf (4.6 MB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2014-12-18
タイトル
タイトル Real-time displacement measurement using VCSEL interferometer
タイトル
言語 en
タイトル Real-time displacement measurement using VCSEL interferometer
言語
言語 eng
キーワード
主題Scheme Other
主題 displacement sensor
キーワード
主題Scheme Other
主題 laser diode
キーワード
主題Scheme Other
主題 interferometer
キーワード
主題Scheme Other
主題 vertical cavity surface emitting laser diode
資源タイプ
資源 http://purl.org/coar/resource_type/c_5794
タイプ conference paper
著者 Suzuki, Takamasa

× Suzuki, Takamasa

WEKO 39

Suzuki, Takamasa

Search repository
Yamada, Noriaki

× Yamada, Noriaki

WEKO 169340

Yamada, Noriaki

Search repository
Sasaki, Osami

× Sasaki, Osami

WEKO 169341

Sasaki, Osami

Search repository
Choi, Samuel

× Choi, Samuel

WEKO 169342

Choi, Samuel

Search repository
抄録
内容記述タイプ Abstract
内容記述 A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 μm and 50 nm for displacements of 150 μm and 1.2 μm, respectively.
内容記述
内容記述タイプ Other
内容記述 Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China
書誌情報 Proceedings of SPIE - the International Society for Optical Engineering
en : Proceedings of SPIE - the International Society for Optical Engineering

巻 8563, p. 85630K-1-85630K-6, 発行日 2012-11
出版者
出版者 International Society for Optical Engineering, SPIE
ISSN
収録物識別子タイプ ISSN
収録物識別子 0277786X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10619755
DOI
識別子タイプ DOI
関連識別子 info:doi/10.1117/12.999720
権利
権利情報 Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers
著者版フラグ
値 publisher
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