@inproceedings{oai:niigata-u.repo.nii.ac.jp:00031020,
 author = {Suzuki, Takamasa and Yamada, Noriaki and Sasaki, Osami and Choi, Samuel},
 book = {Proceedings of SPIE - the International Society for Optical Engineering, Proceedings of SPIE - the International Society for Optical Engineering},
 month = {Nov},
 note = {A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 μm and 50 nm for displacements of 150 μm and 1.2 μm, respectively., Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China},
 pages = {85630K-1--85630K-6},
 publisher = {International Society for Optical Engineering, SPIE},
 title = {Real-time displacement measurement using VCSEL interferometer},
 volume = {8563},
 year = {2012}
}