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Absolute measurement of optical surface profile with a Fizeau interferometer
http://hdl.handle.net/10191/31147
http://hdl.handle.net/10191/31147ab331bde-ff0b-46ae-8742-8593d3ca0f4e
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
8563_85630B.pdf (3.0 MB)
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| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2014-12-18 | |||||
| タイトル | ||||||
| タイトル | Absolute measurement of optical surface profile with a Fizeau interferometer | |||||
| タイトル | ||||||
| タイトル | Absolute measurement of optical surface profile with a Fizeau interferometer | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | absolute measurement | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | surface profile | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | difference wavefront | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | interferometer | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | sinusoidal phase modulation | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_5794 | |||||
| タイプ | conference paper | |||||
| 著者 |
Sasaki, Osami
× Sasaki, Osami× Watanabe, Akihiro× Choi, Samuel× Suzuki, Takamasa |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | An optical surface profile is measured with a laser diode Fizeau interferometer using a method of absolute measurement. Wavefront aberration in the interferometer causes an undesirable phase distribution in the interference signal. To eliminate this phase distribution, the object surface is shifted in two directions orthogonal to each other and the difference wavefront of the surface profile of the object is obtained. An absolute surface profile is estimated by representing the object surface with a polynomial function and by solving the difference equations with least-squares method. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China | |||||
| 書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 8563, p. 85630B-1-85630B-7, 発行日 2012-11 |
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| 出版者 | ||||||
| 出版者 | International Society for Optical Engineering, SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0277786X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10619755 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1117/12.2000145 | |||||
| 権利 | ||||||
| 権利情報 | Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
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Cite as
Sasaki, Osami, Watanabe, Akihiro, Choi, Samuel, Suzuki, Takamasa, 2012, Absolute measurement of optical surface profile with a Fizeau interferometer: International Society for Optical Engineering, SPIE, 85630B-1-85630B-7 p.
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