{"created":"2021-03-01T06:37:08.857310+00:00","id":31019,"links":{},"metadata":{"_buckets":{"deposit":"66736bd3-9d3d-4b53-a66d-e336ac165ae1"},"_deposit":{"id":"31019","owners":[],"pid":{"revision_id":0,"type":"depid","value":"31019"},"status":"published"},"_oai":{"id":"oai:niigata-u.repo.nii.ac.jp:00031019","sets":["423:435:1827","453:457"]},"item_8_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2012-11","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"85630B-7","bibliographicPageStart":"85630B-1","bibliographicVolumeNumber":"8563","bibliographic_titles":[{"bibliographic_title":"Proceedings of SPIE - the International Society for Optical Engineering"},{"bibliographic_title":"Proceedings of SPIE - the International Society for Optical Engineering","bibliographic_titleLang":"en"}]}]},"item_8_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"An optical surface profile is measured with a laser diode Fizeau interferometer using a method of absolute measurement. Wavefront aberration in the interferometer causes an undesirable phase distribution in the interference signal. To eliminate this phase distribution, the object surface is shifted in two directions orthogonal to each other and the difference wavefront of the surface profile of the object is obtained. An absolute surface profile is estimated by representing the object surface with a polynomial function and by solving the difference equations with least-squares method.","subitem_description_type":"Abstract"}]},"item_8_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China","subitem_description_type":"Other"}]},"item_8_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"International Society for Optical Engineering, SPIE"}]},"item_8_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"info:doi/10.1117/12.2000145","subitem_relation_type_select":"DOI"}}]},"item_8_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers"}]},"item_8_select_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_8_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA10619755","subitem_source_identifier_type":"NCID"}]},"item_8_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0277786X","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Sasaki, Osami"}],"nameIdentifiers":[{"nameIdentifier":"169335","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Watanabe, Akihiro"}],"nameIdentifiers":[{"nameIdentifier":"169336","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Choi, Samuel"}],"nameIdentifiers":[{"nameIdentifier":"169337","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Suzuki, Takamasa"}],"nameIdentifiers":[{"nameIdentifier":"39","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-08-26"}],"displaytype":"detail","filename":"8563_85630B.pdf","filesize":[{"value":"3.0 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"8563_85630B.pdf","url":"https://niigata-u.repo.nii.ac.jp/record/31019/files/8563_85630B.pdf"},"version_id":"fa9b42e7-9b55-4b3b-b9f8-7aca9ef009a6"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"absolute measurement","subitem_subject_scheme":"Other"},{"subitem_subject":"surface profile","subitem_subject_scheme":"Other"},{"subitem_subject":"difference wavefront","subitem_subject_scheme":"Other"},{"subitem_subject":"interferometer","subitem_subject_scheme":"Other"},{"subitem_subject":"sinusoidal phase modulation","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Absolute measurement of optical surface profile with a Fizeau interferometer","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Absolute measurement of optical surface profile with a Fizeau interferometer"},{"subitem_title":"Absolute measurement of optical surface profile with a Fizeau interferometer","subitem_title_language":"en"}]},"item_type_id":"8","owner":"1","path":["457","1827"],"pubdate":{"attribute_name":"公開日","attribute_value":"2014-12-18"},"publish_date":"2014-12-18","publish_status":"0","recid":"31019","relation_version_is_last":true,"title":["Absolute measurement of optical surface profile with a Fizeau interferometer"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-15T04:01:34.441495+00:00"}