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Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement
http://hdl.handle.net/10191/27613
http://hdl.handle.net/10191/276138529d876-19a1-4f50-8672-73ec62c8e8d9
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement | |||||
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言語 | en | |||||
タイトル | Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometers | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | laser diodes | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | integrating buckets | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | charge-coupled devices | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | sinusoidal phase modulation | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Zhao, Xuefeng
× Zhao, Xuefeng× Suzuki, Takamasa× Masutomi, Takamasa× Sasaki, Osami |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A disturbance-free sinusoidal phase modulating laser diode interferometer using an accelerated integrating-buckets processing system is described. Several techniques make it suitable for use in on-machine measurements: the charge-coupled device (CCD)-based additive operation on integrating buckets shares the burden of data processing imposed on the computer to shorten the measurement time; the use of high-speed shutter function of the CCD camera enables each bucket to be collected without disturbance, while the interference signal’s stability is enhanced with the feedback control during the entire data-collecting time; by using a dedicated waveform generator, the phase modulating system is more compact and the modulating signal matches the CCD camera’s exposure time easily and exactly. A surface profile measurement on a diamond-turned aluminum disk is demonstrated to evaluate the performance of this system. | |||||
書誌情報 |
Optical Engineering en : Optical Engineering 巻 44, 号 12, p. 125602-1-125602-7, 発行日 2005-12 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00913286 | |||||
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収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00333891 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/1.2148447 | |||||
権利 | ||||||
権利情報 | Copyright 2005 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |||||
著者版フラグ | ||||||
値 | publisher |