@article{oai:niigata-u.repo.nii.ac.jp:00002204,
 author = {Zhao, Xuefeng and Suzuki, Takamasa and Masutomi, Takamasa and Sasaki, Osami},
 issue = {12},
 journal = {Optical Engineering, Optical Engineering},
 month = {Dec},
 note = {A disturbance-free sinusoidal phase modulating laser diode interferometer using an accelerated integrating-buckets processing system is described. Several techniques make it suitable for use in on-machine measurements: the charge-coupled device (CCD)-based additive operation on integrating buckets shares the burden of data processing imposed on the computer to shorten the measurement time; the use of high-speed shutter function of the CCD camera enables each bucket to be collected without disturbance, while the interference signal’s stability is enhanced with the feedback control during the entire data-collecting time; by using a dedicated waveform generator, the phase modulating system is more compact and the modulating signal matches the CCD camera’s exposure time easily and exactly. A surface profile measurement on a diamond-turned aluminum disk is demonstrated to evaluate the performance of this system.},
 pages = {125602-1--125602-7},
 title = {Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement},
 volume = {44},
 year = {2005}
}