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Superluminescent diode interferometer using sinusoidal phase modulation for step profile measurement
http://hdl.handle.net/10191/27520
http://hdl.handle.net/10191/27520b3c1b1c0-7139-4161-aacc-6229fe9f9e68
名前 / ファイル | ライセンス | アクション |
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37_22_5126-5131.pdf (552.9 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Superluminescent diode interferometer using sinusoidal phase modulation for step profile measurement | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Superluminescent diode interferometer using sinusoidal phase modulation for step profile measurement | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Sasaki, Osami
× Sasaki, Osami× Ikeada, Yoshihiro× Suzuki, Takamasa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We propose an interferometer in which the relationship between the degree of coherence (DCH) and the optical path difference (OPD) is utilized for determining an OPD longer than a wavelength. A superluminescent diode is employed as the source of the interferometer, and sinusoidal phase-modulating interferometry is used to detect the DCH and the phase of the interference signal. The combination of the OPD determined from the DCH and the phase of an interference signal enables us to measure an OPD longer than a wavelength with a high accuracy of a few nanometers. Experimental results show clearly the usefulness of the interferometer for a step-profile measurement. | |||||
書誌情報 |
Applied Optics en : Applied Optics 巻 37, 号 22, p. 5126-5131, 発行日 1998-08 |
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出版者 | ||||||
出版者 | Optical Society of America | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00036935 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543409 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1364/AO.37.005126 | |||||
権利 | ||||||
権利情報 | © 1998 Optical Society of America | |||||
権利 | ||||||
権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.37.005126. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
著者版フラグ | ||||||
値 | publisher |