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Phase-locked phase-shifting laser diode interferometer with photothermal modulation
http://hdl.handle.net/10191/27505
http://hdl.handle.net/10191/275055616d364-bdcc-496e-8f3c-8e25bc487a5e
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | Phase-locked phase-shifting laser diode interferometer with photothermal modulation | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Phase-locked phase-shifting laser diode interferometer with photothermal modulation | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Zhao, Xuefeng× Sasaki, Osami |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We propose a phase-shifting interferometer that uses both phase-locked and photothermal modulating techniques. In this interferometer the measurement accuracy is not affected by the intensity modulation that usually appears in current modulation. The surface profile of a diamond-turned aluminum disk was measured; the rms repeatability obtained was lambda/460. | |||||
書誌情報 |
Applied Optics en : Applied Optics 巻 40, 号 13, p. 2126-2131, 発行日 2001-05 |
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出版者 | ||||||
出版者 | Optical Society of America | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00036935 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543409 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1364/AO.40.002126 | |||||
権利 | ||||||
権利情報 | © 2001 Optical Society of America | |||||
権利 | ||||||
権利情報 | This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.40.002126. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. | |||||
著者版フラグ | ||||||
値 | publisher |