@article{oai:niigata-u.repo.nii.ac.jp:00001529,
 author = {Suzuki, Takamasa and Zhao, Xuefeng and Sasaki, Osami},
 issue = {13},
 journal = {Applied Optics, Applied Optics},
 month = {May},
 note = {We propose a phase-shifting interferometer that uses both phase-locked and photothermal modulating techniques. In this interferometer the measurement accuracy is not affected by the intensity modulation that usually appears in current modulation. The surface profile of a diamond-turned aluminum disk was measured; the rms repeatability obtained was lambda/460.},
 pages = {2126--2131},
 title = {Phase-locked phase-shifting laser diode interferometer with photothermal modulation},
 volume = {40},
 year = {2001}
}