Two-dimensional step-profile measurement is carried out with a sinusoidal wavelength-scanning interferometer where a large scanning width of 41 nm is easily achieved using a superluminescent laser diode of a wide spectral bandwidth of 46 nm. To detect a time-varying interference signal with a short integration time of 118 μs, a shutter function of a two-dimensional CCD image sensor is utilized. A step profile with a step height of 1 μm is measured with an error less than a few nanometers. A Step profile with a step height of 20 μm is also measured with a scanning width of 23 nm.
内容記述
Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. : Oct 2002, Shanghai, China
雑誌名
Proceedings of SPIE - the International Society for Optical Engineering
巻
4919
ページ
220 - 226
発行年
2002-10
出版者
International Society for Optical Engineering, SPIE
ISSN
0277786X
書誌レコードID
AA10619755
DOI
info:doi/10.1117/12.465815
権利
Copyright 2002 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement
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